Decay length of the pressure dependent deposition rate for magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2728-2732

  Drüsedau, Tilo P ^a   Löhmann, Mirko ^a   Garke, Bernd ^a  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032349753     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581408     Document Type: Article

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