Hot filament CVD conductive microcrystalline diamond for high Q, high acoustic velocity micromechanical resonators

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2011, Pages

  Akgul, Mehmet ^a   Schneider, Robert ^a   Ren, Zeying ^a   Chandler, Gerry ^b   Yeh, Victor ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Sp3 Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BATCH FABRICATION; BORON-DOPED; CVD DIAMOND; DISK RESONATOR; HOT FILAMENT CVD; MICROCRYSTALLINE DIAMOND; MICROMECHANICAL RESONATOR; MICROWAVE CVD; ON-CHIP RESONATORS; POTENTIAL APPLICATIONS;

ACOUSTIC WAVE VELOCITY; ACOUSTIC WAVE VELOCITY MEASUREMENT; BORON; DIAMONDS; RESONATORS;

ACOUSTIC RESONATORS;

EID: 80155213320     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FCS.2011.5977877     Document Type: Conference Paper

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