Effect of silicon oxide, silicon nitride and polysilicon layers on the electrostatic pressure during anodic bonding

Sensors and Actuators, A: Physical

Volumn 67, Issue 1-3, 1998, Pages 181-184

  Plaza, J A ^a   Esteve, J ^a   Lora Tamayo, E ^a  

^a CSIC   (Spain)

Author keywords

Anodic bonding; Electrostatic test

Indexed keywords

ELECTROSTATICS; GLASS; GLASS BONDING; SILICA; SILICON; SILICON NITRIDE;

ANODIC BONDING; ELECTROSTATIC TESTING;

SILICON WAFERS;

EID: 0043286543     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01739-1     Document Type: Article

References (7)

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