Facile fabrication of true three-dimensional microcoils inside fused silica by a femtosecond laser

Journal of Micromechanics and Microengineering

Volumn 22, Issue 10, 2012, Pages

  He, Shengguan ^a   Chen, Feng ^a   Yang, Qing ^a   Liu, Keyin ^a   Shan, Chao ^a   Bian, Hao ^a   Liu, Hewei ^a   Meng, Xiangwei ^a   Si, Jinhai ^a   Zhao, Yulong ^a   Hou, Xun ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARBITRARY GEOMETRY; CHEMICAL ETCHING; FABRICATION PROCESS; FACILE FABRICATION; FACILE METHOD; FUSED SILICA SUBSTRATES; HIGH ASPECT RATIO; LAB ON A CHIP; MICROCOILS; ON CHIPS;

ASPECT RATIO; FABRICATION; MICROCHANNELS; ULTRASHORT PULSES;

THREE DIMENSIONAL;

EID: 84866312935     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/10/105017     Document Type: Article

References (27)

1. Lu Y and Ji H-F 2007 Fabrication of microcoil/microsprings for novel chemical and biological sensing Sensors Actuators B 123 937-41 (Pubitemid 46678788)
2. Yoshimura K, Nakano K, Miyake T, Hishikawa Y, Kuzuya C, Katsuno T and Motojima S 2007 Effect of compressive and tensile strains on the electrical resistivity of carbon microcoil/silicone-rubber composites Carbon 45 1997-2003 (Pubitemid 47238065)
3. Seemann K, Leiste H and Bekker V 2006 A new generation of CMOS-compatible high frequency micro-inductors with ferromagnetic cores: theory, fabrication and characterization J. Magn. Magn. Mate. 302 321-6
4. Massin C, Boero G, Vincent F, Abenhaim J, Besse P A and Popovic R S 2002 High-Q factor RF planar microcoils for micro-scale NMR spectroscopy Sensors Actuators A 97-98 280-8 (Pubitemid 34758736)
5. Rong R, Choi J-W and Ahn C H 2006 An on-chip magnetic bead separator for biocell sorting J. Micromech. Microeng. 16 2783-90 (Pubitemid 46069551)
6. Koo C, Godley R F, Park J, McDougall M P, Wright S M and Han A 2011 A magnetic resonance (MR) microscopy system using a microfluidically cryo-cooled planar coil Lab Chip 11 2197-203
7. Badilita V, Kratt K, Baxan N, Mohmmadzadeh M, Burger T and Weber H 2010 On-chip three dimensional microcoils for MRI at the microscale Lab Chip 10 1387-90
8. Kong Tian Fook, Peng Weng Kung, Luong Trung Dung, Nguyen Nam-Trung and Han Jongyoon 2012 Adhesive-based liquid metal radio-frequency microcoil for magnetic resonance relaxometry measurement Lab Chip 12 287-94
9. Lam M H C, Homenuke M A, Michal1 C A and Hansen C L 2009 Sub-nanoliter nuclear magnetic resonance coils fabricated with multilayer soft lithography J. Micromech. Microeng. 19 095001
10. Takahashi H, Dohi T, Matsumoto K and Shimoyama I 2007 A micro planar coil for local high resolution magnetic resonance imaging Proc. IEEE MEMS (Kobe,) pp 549-52
11. Ahn C H and Allen M G 1993 A planar micromachined spiral inductor for integrated magnetic microactuator applications J. Micromech. Microeng. 3 37-44
12. Dohi T, Kuwana K, Matsumoto K and Shimoyama I 2007 A standing micro coil for a high resolution MRI Proc. IEEE Transducers pp 1313-16
13. Klein M J K, Ono T, Esashi M and Korvink J G 2008 Process for the fabrication of hollow core solenoidal microcoils in borosilicate glass J. Micromech. Microeng. 18 075002
14. Lochel B, Maciossek A, Rothe M and Windbracke W 1996 Microcoils fabricated by UV depth lithography and galvanoplating Sensors Actuators A 54 663-8 (Pubitemid 126357031)
15. Seeber D A, Cooper R L, Ciobanu L and Pennington C H 2001 Design and testing of high sensitivity microreceiver coil apparatus for nuclear magnetic resonance and imaging Rev. Sci. Instrum. 72 2171-9
16. Kratt K, Badilita V, Burger T, Korvink J G and Wallrabe U 2010 A fully MEMS-compatible process for 3D high aspect ratio micro coils obtained with an automatic wire bonder J. Micromech. Microeng. 20 015021
17. Goto S, Matsunaga T, Matsuoka Y, Kuroda K, Esashi M and Haga Y 2007 Development of high-resolution intraluminal and intravascular MRI probe using microfabrication on cylindrical substrates Proc. IEEE MEMS pp 329-32
18. Sillerud L O, McDowell A F, Adolphi N L, Serda R E, Adams D P, Vasile M J and Alam T M 2006 1H detection of superparamagnetic nanoparticles at 1 T using a microcoil and novel tuning circuit J. Magn. Reson. 181 181-90 (Pubitemid 44107731)
19. Osellame R, Hoekstra H J W M, Cerullo G and Pollnau M 2011 Femtosecond laser microstructuring: an enabling tool for optofluidic lab-on-chips Laser Photon. Rev. 5 442-63
20. Li Y, Itoh K, Watanabe W, Yamada K, Kuroda D, Nishii J and Jiang Y 2001 Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses Opt. Lett. 26 1912-4 (Pubitemid 33693142)
21. Li C, Chen T, Si J, Chen F, Shi X and Hou X 2009 Fabrication of three-dimensional microchannels inside silicon using a femtosecond laser J. Micromech. Microeng. 19 125007
22. Vishnubhatla K C, Bellini N, Ramponi R, Cerullo G and Osellame R 2009 Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching Opt. Express 17 8685-95
23. He F, Cheng Y and Xu Z 2010 Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser Opt. Lett. 35 282-4
24. Maselli V, Osellame R, Cerullo G, Ramponi R, Laporta P, Magagnin L and Cavallotti P L 2006 Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching Appl. Phys. Lett. 88 191107 (Pubitemid 43736676)
25. Osellame R, Maselli V, Vazquez R M, Ramponi R and Cerullo G 2007 Integration of optical waveguides and microfluidic channels both fabricated by femtosecond laser irradiation Appl. Phys. Lett. 90 231118 (Pubitemid 46960270)
26. Yu X, Liao Y, He F, Zeng B, Cheng Y, Xu Z, Sugioka K and Midorikawa K 2011 Tuning etch selectivity of fused silica irradiated by femtosecond laser pulses by controlling polarization of the writing pulses J. Appl. Phys. 109 053114
27. Siegel A C, Bruzewicz D A, Weibel D B and Whitesides G M 2007 Microsolidics: fabrication of three-dimensional metallic microstructures in poly (dimethylsiloxane) Adv. Mater. 19 727-33 (Pubitemid 46932842)