Fabrication of microcoil/microsprings for novel chemical and biological sensing

Sensors and Actuators, B: Chemical

Volumn 123, Issue 2, 2007, Pages 937-941

  Lu, Yangqing ^a   Ji, Hai Feng ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

Chemical sensor; Microcoil; Microsensor; Microspring; Silicon plasma dry etching

Indexed keywords

CHEMICAL SENSORS; DRY ETCHING; INDUCTIVELY COUPLED PLASMA; MEDICAL APPLICATIONS; SILICA; SURFACE TREATMENT;

MICROCOILS; MICROSPRING; SILICON PLASMA DRY ETCHING; SURFACE STRESS;

MICROSENSORS;

EID: 34247646943     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.10.058     Document Type: Article

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