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Volumn 302, Issue 2, 2006, Pages 321-326
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A new generation of CMOS-compatible high frequency micro-inductors with ferromagnetic cores: Theory, fabrication and characterisation
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Author keywords
High frequency permeability; Magnetic thin films; Micro inductors; Passive circuit components; Uniaxial anisotropy
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Indexed keywords
CMOS INTEGRATED CIRCUITS;
FERROMAGNETISM;
GLOBAL POSITIONING SYSTEM;
MAGNETIC THIN FILMS;
MAXWELL EQUATIONS;
MOBILE TELECOMMUNICATION SYSTEMS;
HIGH-FREQUENCY PERMEABILITY;
MICRO-INDUCTORS;
PASSIVE CIRCUIT COMPONENTS;
UNIAXIAL ANISOTROPY;
ELECTRIC INDUCTORS;
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EID: 33645934227
PISSN: 03048853
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jmmm.2005.05.042 Document Type: Article |
Times cited : (33)
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References (13)
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