Fabrication of size-controllable nanofluidic channels using angled physical vapor deposition

Microelectronic Engineering

Volumn 98, Issue , 2012, Pages 647-650

  Li, Xiaojun ^a   Wang, Xudi ^b   Li, Xin ^b   Jin, Jian ^b   You, Hui ^a   Qiu, Keqiang ^c   Fu, Shaojun ^c  

^a INSTITUTE OF INTELLIGENT MACHINES   (China)

^b HEFEI UNIVERSITY OF TECHNOLOGY   (China)

^c UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Angled ion beam sputtering; Dimension controller; Nanochannels; SU 8

Indexed keywords

COVER LAYERS; CROSS SECTION; HIGH RESOLUTION; ION-BEAM SPUTTERING; LOW COST FABRICATION; NANO CHANNELS; NANO PATTERN; NANO-GRATINGS; NANOFLUIDIC CHANNEL; OBLIQUE ANGLES; SIMPLE METHOD; SINGLE-STEP; SIZE REDUCTIONS; SU-8; ULTRA-SMALL;

NANOFLUIDICS; SILICON OXIDES; VAPORS;

SUBSTRATES;

EID: 84865596212     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.07.029     Document Type: Conference Paper

References (11)

1. Sung-wook Nam, Min-Hyun Lee, and Seung-Hyun Lee Nano Lett. 10 2010 3324 3329
2. Xiaogan. Liang, Keith.J. Morton, Robert.H. Austin, and Stephen.Y. Chou Nano Lett. 12 2007 3774 3780
3. Han Cao, Zhaoning Yu, and Jian Wang Appl. Phys. Lett. 81 2002 174 176
4. L. Jay Guo, Xing Cheng, and Chia-Fu Chou Nano Lett. 4 2004 69
5. X.-M. Yan, S. Kwon, A.M. Contreras, J. Bokor, and G.A. Somorjai Nano Lett. 5 2005 745 748
6. John G. Bai, Cheng-Ling Chang, Jae-Hyun Chung, and Kyoung-Hoon Lee NanoTechnol. 18 2007 405307 8 pp
7. Yiping Zhao, Erwin Berenschot, and Meint de Bore J. Micromech. Microeng. 18 2008 064013 6 pp
8. Xudi Wang, Liangjin Ge, and Jingjing Lu Microelectron. Eng. 86 2009 1347 1349
9. Xiaojun Li, Xudi Wang, and Jian Jin Microelectron. Eng. 87 2010 722 725
10. Jasbir N. Patel, Bozena kaminska, Bonnie L. Gray, and Byron D. Gates J. Micromech. Microeng. 18 2008 095028
11. Chen Gao, Zhencheng Xu, and Shaoren Deng Microelectron. Eng. 88 2011 2100 2104