Fabrication of micro/nano fluidic system combining hybrid mask-mould lithography with thermal bonding

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 722-725

  Li, Xiaojun ^a   Wang, Xudi ^b   Jin, Jian ^b   Tang, Qisheng ^b   Tian, Yangchao ^a   Fu, Shaojun ^a   Cui, Z ^c  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b HEFEI UNIVERSITY OF TECHNOLOGY   (China)

^c RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

Hybrid mask mould lithography; Micro nano fluidic system; SU 8; Thermal bonding

Indexed keywords

ADHESIVE LAYERS; BIOLOGICAL APPLICATIONS; BONDING PROCESS; BONDING STRENGTH; CAPILLARY FILLING; CHANNEL PROFILE; FABRICATION PROCESS; FLUIDIC SYSTEMS; HYBRID MASK-MOULD LITHOGRAPHY; ONE STEP; PET SUBSTRATE; SURFACE TEXTURES; THERMAL BONDING;

FABRICATION; MOLDS; PHYSICAL CHEMISTRY; RESERVOIRS (WATER);

LITHOGRAPHY;

EID: 76949098714     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.12.024     Document Type: Article

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