Mechanical properties of tin coatings deposited at different temperatures by IBAD process

FME Transactions

Volumn 40, Issue 1, 2012, Pages 37-42

  Kakaš, Damir ^a   Škorić, Branko ^a   Terek, Pal ^a   Kovačević, Lazar ^a   Vilotić, Marko ^a  

^a UNIVERSITY OF NOVI SAD   (Serbia)

Author keywords

Afm; Deposition temperature; Ibad; Surface roughness; Tin

Indexed keywords

EID: 84865563666     PISSN: 14512092     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (19)

1. Combadiere, L. and Machet, J.: Reactive magnetron sputtering deposition of TiN films. I. Influence of the substrate temperature on structure, composition and morphology of the films, Surface and Coatings Technology, Vol. 88, No. 1-3, pp. 17-27, 1997.
2. Patsalas, P., Charitidis, C. and Logothetidis, S.: The effect of substrate temperature and biasing on the mechanical properties and structure of sputtered titanium nitride thin films, Surface and Coatings Technology, Vol. 125, No. 1-3, pp. 335-340, 2000.
3. Gåhlin, R., Bromark, M., Hedenqvist, P., Hogmark, S. and Håkansson, G.: Properties of TiN and CrN coatings deposited at low temperature using reactive arc-evaporation, Surface and Coatings Technology, Vol. 76-77, No. 1, pp. 174-180, 1995.
4. Ensinger, W.: Ion bombardment effects during deposition of nitride and metal films, Surface and Coatings Technology, Vol. 99, No. 1-2, pp. 1-13, 1998.
5. Šikola, T., Spousta, J., Češka, R., Zlámal, J., Dittrichová, L., Nebojsa, A., Navrátil, K., Rafaja, D., Zemek, J. and Peřina, V.: Deposition of metal nitrides by IBAD, Surface and Coatings Technology, Vol. 108-109, pp. 284-291, 1998.
6. Rauschenbach, B.: Ion beam assisted deposition - a processing technique for preparing thin films for high-technology applications, Vacuum, Vol. 69, No. 1-3, pp. 3-10, 2002.
7. Yokota, K., Nakamura, K., Kasuya, T. and Ohnishi, M.: Phase composition and crystalline structure of titanium nitride deposited on silicon by an ionbeam assisted deposition technique, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 206, pp. 386-389, 2003.
8. Königer, A., Gerlach, J.W., Wengenmair, H., Hammerl, C., Hartmann, J. and Rauschenbach, B.: Mechanical characterisation of titanium nitride films formed by low- energy ion beam assisted deposition, Surface and Coatings Technology, Vol. 84, No. 1-3, pp. 439-442, 1996.
9. Korsunsky, A.M., McGurk, M.R., Bull, S.J. and Page, T.F.: On the hardness of coated systems, Surface and Coatings Technology, Vol. 99, No. 1-2, pp. 171-183, 1998.
10. Burnett, P.J. and Rickerby, D.S.: The relationship between hardness and scratch adhesion, Thin Solid Films, Vol. 154, No. 1-2, pp. 403-416, 1987.
11. Perry, A.J., Treglio, J.R. and Tian, A.F.: Lowtemperature deposition of titanium nitride, Surface and Coatings Technology, Vol. 76-77, No. 2, pp. 815-820, 1995.
12. Hedenqvist, P., Bromark, M., Olsson, M. and Hogmark, S.: Mechanical and tribological characterization of low-temperature deposited PVD TiN coatings, Surface and Coatings Technology, Vol. 63, No. 1-2, pp. 115-122, 1994.
13. Oleszkiewicz, W. and Romiszowski, P.: Characteristics of surface and film morphology in the IBAD deposition process: a Monte Carlo simulation study, Vacuum, Vol. 70, No. 2-3, pp. 347-352, 2003.
14. Ji, H. and Was, G.S.: Linkage between crystallographic texture and surface roughness in niobium films synthesized by ion beam assisted deposition, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 148, No. 1-4, pp. 880-885, 1999.
15. He, Y., Zhang, J., Yao, W., Li, D. and Teng, X.: Effect of temperature on residual stress and mechanical properties of Ti films prepared by both ion implantation and ion beam assisted deposition, Applied Surface Science, Vol. 255, No. 8, pp. 4484-4490, 2009.
16. López, J.M., Gordillo-Vázquez, F.J., Böhme, O. and Albella, J.M.: Low grain size TiN thin films obtained by low energy ion beam assisted deposition, Applied Surface Science, Vol. 173, No. 3-4, pp. 290-295, 2001.
17. Xu, J., Shao, T., Wei, S. and Qin, Li.: Effect of ion beam bombardment on the properties of Ni films deposited on polyimide by ion beam assisted deposition, Surface and Coatings Technology, Vol. 204, No. 21-22, pp. 3443-3450, 2010.
18. Tayebi, N. and Polycarpou, A.A.: Modeling the effect of surface roughness on the adhesion, contact and friction in Micro-Electro-Mechanical Systems (MEMS) interfaces, in: Proceedings of the ASME 2003 International Mechanical Engineering Congress and Exposition (IMECE2003), 15-21.11.2003, Washington, D.C., USA, pp. 75-82.
19. Jiménez, H., Restrepo, E. and Devia, A.: Effect of the substrate temperature in ZrN coatings grown by the pulsed arc technique studied by XRD, Surface and Coatings Technology, Vol. 201, No. 3-4, pp. 1594-1601, 2006.