SCOPUS 정보 검색 플랫폼

Volumn 108-109, Issue , 1998, Pages 284-291

Deposition of metal nitrides by IBAD

(10) Sikola T a Spousta, J a Ceska R a Zlamal J a Dittrichova L a Nebojsa, A b Navratil K b Rafaja, D c Zemek, J d Perina V e

a BRNO UNIVERSITY OF TECHNOLOGY (Czech Republic)

b MASARYK UNIVERSITY (Czech Republic)

c CHARLES UNIVERSITY (Czech Republic)

d INSTITUTE OF PHYSICS (Czech Republic)

e NUCLEAR PHYSICS INSTITUTE (Czech Republic)

Author keywords

Ellipsometry; Ion beam assisted deposition; Nitride; XPS; XRD

Indexed keywords

ADHESION; ALUMINUM COMPOUNDS; DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; ION BEAMS; ION BOMBARDMENT; MOLYBDENUM COMPOUNDS; REFRACTIVE INDEX; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; TITANIUM NITRIDE;

ALUMINUM NITRIDE; ION-BEAM ASSISTED DEPOSITION (IBAD); MOLYBDENUM NITRIDE; PROFILOMETRY;

CERAMIC COATINGS;

EID: 0032184143 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(98)00654-9 Document Type: Article

Times cited : (7)

References (11)

1
- 0028065558
- Colligon J.S., Kheyrandish H., Lesnevsky L.N., Naumkin A., Rogozin A, Shkarban I.I., Vasilyev L., Yurasova V.E. Surf. Coat. Technol. 70:1994;9.
- (1994) Surf. Coat. Technol. , vol.70 , pp. 9
- Colligon, J.S.¹ Kheyrandish, H.² Lesnevsky, L.N.³ Naumkin, A.⁴ Rogozin, A.⁵ Shkarban, I.I.⁶ Vasilyev, L.⁷ Yurasova, V.E.⁸

2
- 0001119330
- Mudholkar M.S., Thompson L.T. J. Appl. Phys. 77:1995;5138.
- (1995) J. Appl. Phys. , vol.77 , pp. 5138
- Mudholkar, M.S.¹ Thompson, L.T.²

3
- 0000815007
- Strite S., Morkoç H. J. Vac. Sci. Technol. B10:1992;1237.
- (1992) J. Vac. Sci. Technol. , vol.10 , pp. 1237
- Strite, S.¹ Morkoç, H.²

4
- 0020175914
- Harper J.M.E., Cuomo J.J. J. Vac. Sci. Technol. 21:1982;737.
- (1982) J. Vac. Sci. Technol. , vol.21 , pp. 737
- Harper, J.M.E.¹ Cuomo, J.J.²

5
- 4243833423
- Šikola T., Spousta J., Dittrichová L. Scripta Fac. Sci., Nat. Univ. Masaryk. Brun. 22:1992;119.
- (1992) Scripta Fac. Sci., Nat. Univ. Masaryk. Brun. , vol.22 , pp. 119
- Šikola, T.¹ Spousta, J.² Dittrichová, L.³

6
- 0004077680
- Max-Planck-Institut für Plasmaphysik, Garching, Germany
- M. Mayer, SIMNRA User's Guide, Technical Report IPP 9/113, Max-Planck-Institut für Plasmaphysik, Garching, Germany, 1997.
- (1997) SIMNRA User's Guide, Technical Report IPP 9/113
- Mayer, M.¹

7
- 4243349335
- Ellipsometry and Transport Studies of Thin-film Metal Nitrides
- 27 April-1 May San Diego
- J. Humlíček, A. Nebojsa, J. Hora, M. Stránský, J. Spousta, T. Šikola, Ellipsometry and Transport Studies of Thin-film Metal Nitrides, in: Proceedings of the ICMCTF'98, 27 April-1 May 1998, San Diego.
- (1998) In: Proceedings of the ICMCTF'98
- Humlíček, J.¹ Nebojsa, A.² Hora, J.³ Stránský, M.⁴ Spousta, J.⁵ Šikola, T.⁶

8
- 0030270882
- Šikola T., Spousta J., Dittrichová L., Nebojsa A., Peřina V., Češka R. Surf. Coat. Technol. 84:1996;485.
- (1996) Surf. Coat. Technol. , vol.84 , pp. 485
- Šikola, T.¹ Spousta, J.² Dittrichová, L.³ Nebojsa, A.⁴ Peřina, V.⁵ Češka, R.⁶

9
- 0030401042
- Rafaja D., Valvoda V., Kužel R., Perry A.J., Treglio J.R. Surf. Coat. Technol. 86 87:1996;302-308.
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 302-308
- Rafaja, D.¹ Valvoda, V.² Kužel, R.³ Perry, A.J.⁴ Treglio, J.R.⁵

10
- 0038855027
- International Centre for Diffraction Data, Pennsylvania
- PDF-2 on CD-ROM, Database Sets 1-47, International Centre for Diffraction Data, Pennsylvania, 1997.
- (1997) PDF-2 on CD-ROM, Database Sets 1-47

11
- 0017943225
- Jehn H., Ettmayer P. J. Less-Common Met. 58:1978;85.
- (1978) J. Less-Common Met. , vol.58 , pp. 85
- Jehn, H.¹ Ettmayer, P.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.