Linkage between crystallographic texture and surface roughness in niobium films synthesized by ion beam assisted deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 880-885

  Ji, H ^a   Was, G S ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

IBAD; Nb; Surface roughness; Texture

Indexed keywords

CRYSTALLOGRAPHY; FILM GROWTH; GRAIN SIZE AND SHAPE; ION BEAMS; SEMICONDUCTING SILICON; SPUTTER DEPOSITION; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL); TEXTURES; THIN FILMS;

ION BEAM ASSISTED DEPOSITION (IBAD);

SEMICONDUCTING FILMS;

EID: 0033513921     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00806-4     Document Type: Article

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