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Surface and Coatings Technology

Volumn 99, Issue 1-2, 1998, Pages 1-13

Ion bombardment effects during deposition of nitride and metal films

(1) Ensinger, W a

a UNIVERSITY OF AUGSBURG (Germany)

Author keywords

Ion beam assisted deposition; Nickel; Texture; Titanium nitride

Indexed keywords

EID: 0002367696 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00410-6 Document Type: Review

Times cited : (64)

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