Low-power-consumption metal oxide NO 2 gas sensor based on micro-heater and screen printing technology

Journal of Nanoscience and Nanotechnology

Volumn 12, Issue 7, 2012, Pages 5543-5546

  Moon, S E ^a   Lee, H K ^a   Choi, N J ^a   Lee, J ^a   Yang, W S ^a   Kim, J ^a   Jong, J J ^b   Yoo, D J ^b  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b Sentech Korea   (South Korea)

Author keywords

Gas Sensor; Micro Heater; NO 2; Screen Printing

Indexed keywords

BRIDGE-TYPE; CMOS COMPATIBLE; CMOS PROCESSS; COPRECIPITATION METHOD; GAS DETECTION; HEAT SPREADING; HIGH SENSITIVITY; LOW-POWER CONSUMPTION; MASS PRODUCTION; MEMS PROCESS; METAL OXIDES; MICRO-GAS SENSORS; MICROHEATER; MONITORING SYSTEM; NANO POWDERS; PT HEATERS; RARE METALS; SCREEN PRINTING TECHNOLOGY; SCREEN-PRINTED; SENSING PROPERTY; SI SUBSTRATES;

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; FABRICATION; GAS DETECTORS; HEAT RESISTANCE; HEATING EQUIPMENT; INERT GASES; METALLIC COMPOUNDS; PLATINUM; POWDER METALS; SCREEN PRINTING; TIN; TIN OXIDES;

NITROGEN OXIDES;

EID: 84865134635     PISSN: 15334880     EISSN: 15334899     Source Type: Journal    
DOI: 10.1166/jnn.2012.6364     Document Type: Article

References (28)

1. T.-H. Chen and W.-K. Shih, ETRI Journal 32, 704 (2010).
2. J. Lee, ETRI Journal 32, 540 (2010).
3. S. J. Tans, A. R. M. Verschueren, and C. Dekker, Nature 393, 49 (1998).
4. X. Duan, Y. Huang, Y. Cui, J. Wang, and C. M. Lieber, Nature 409, 66 (2001).
5. J. Hahm and C. M. Lieber, Nano Letters 4, 51 (2004).
6. C. Li, D. Zhang, X. Liu, S. Han, T. Tang, J. Han, and C. Zhou, Appl. Phys. Lett. 82, 1613 (2003).
7. J. Li, Y. Lu, Q. Ye, M. Cinke, J. Han, and M. Meyyappan, Nano Letters 3, 929 (2003).
8. J. Kong, N. R. Franklin, C. Zhou, M. G. Chapline, S. Peng, K. Cho, and H. Dai, Science 287, 622 (2000).
9. J. C. Belmonte, J. Manzano, J. Arbiol, A. Cirera, J. Puigcorbe, A. Vila, N. Sabate, I. Gracia, C. Cane, and J. R. Morante, Sens. Actuators, B 114, 881 (2006).
10. M. Graf, D. Barrenttino, K.-U. Kirstein, and A. Hierlemann, Sens. Actuators, B 117, 346 (2006).
11. T. Iwaki, J. A. Covington, F. Udrea, S. Z. Ali, P. K. Guha, and J. W. Gardner, Journal of Physics C 15, 27 (2005).
12. S. E. Moon, J.-W. Lee, S.-J. Park, J. Park, K.-H. Park, and J. Kim, J. Korean Phys. Soc. 56, 434 (2010).
13. A. D. DeHennis and K. D. Wise, Journal of Microelectromechanical Systems 14, 12 (2005).
14. C. Hagleitner, A. Hierlemann, D. Lange, A. Kummer, N. Kerness, O. Brand and H. Baltes, Nature 414, 293 (2001).
15. I.-S. Hwang and J.-H. Lee, J. Nanoeng. Nanomanuf. 1, 1 (2011).
16. S. J. Park, J. Park, H-Y. Lee, S. E. Moon, K.-H. Park, J. Kim, S. Maeng, F. Udrea, W. I. Milne, and G. T. Kim, J. Nanosci. Nanotechnol. 10, 3385 (2010).
17. L. Zhao, M.-S. Choi, H.-S. Kim, and S.-H. Hong, Nanotechnology 18, 445501 (2007).
18. S. E. Moon, H.-Y. Lee, J. Park, J.-W. Lee, N.-J. Choi, S.-J. Park, J.-H. Kwak, K.-H. Park, J. Kim, G.-H. Cho, T.-H. Lee, S. Maeng, F. Udrea, and W. I. Milne, J. Nanosci. Nanotechnol. 10, 3189 (2010).
19. F. H. Ramirez, A. Tarancon, O. Casals, J. Arbiol, A. R. Rodriguez, and J. R. Morante, Sens. Actuators, B 121, 3 (2007).
20. M. C. Carotta, S. Gherardi, C. Malagu, M. Nagliati, B. Vendemiati, G. Martinelli, M. Sacerdoti, and I. G. Lesci, Thin Solid Films 515, 8339 (2007).
21. V. N. Singh, B. R. Mehta, R. K Joshi, and F. E. Kruis, J. Nanosci. Nanotechnol. 7, 1930 (2007).
22. K. Ryu, D. Zhang, and C. Zhou, Appl. Phys. Lett. 92, 093111 (2008).
23. Y. Zhang, A. Komakov, Y. Lilach, and M. Moskovits, J. Phys. Chem. B 109, 1923 (2005).
24. N. S. Ramgir, I. S. Mulla, and K. P. Vijayamohanan, Sens. Actuators, B 107, 708 (2005).
25. E. Comini, G. Faglia, G. Sberveglieri, D. Calestani, L. Zanotti, and M. Zha, Sens. Actuators, B 111, 2 (2005).
26. www.figaro.co.jp
27. N. Barsan, M. Schweizer-Berberich, and W. Gopel, J. Annal. Chem. 365, 287 (1999).
28. J. Gardner and P. N. Bartlett, Electronic Nose: Principles and Applications, Oxford University Press, New York (1999).