Design and simulation of resistive SOI CMOS micro-heaters for high temperature gas sensors

Journal of Physics: Conference Series

Volumn 15, Issue 1, 2005, Pages 27-32

  Iwaki, T ^a,b   Covington, J A ^a   Udrea, F ^c   Ali, S Z ^c   Guha, P K ^c   Gardner, J W ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b DENSO CORPORATION   (Japan)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24144489472     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/15/1/005     Document Type: Article

References (8)

1. Jones E 1987 Solid State Gas Sensors ed Moseley P T and Tofield B C (Bristol: Adam-Hilger) p 17-31
2. Gardner J W, Varadan V K and Awadelkarim O O 2001 Microsensors MEMS and Smart Devices (Chichester: Wiley)
3. Krebs P and Grisel A 1993 Sensors Actuators B 13 155-8
4. Pike A and Gardner J W 1997 Sensors Actuators B 45 19-26
5. Suehle J S, Cavicchi R E, Gaitan M and Semancik S 1993 IEEE Electron Device Lett. 14 118-20 3
6. Laconte J, Dupont C, Flandre D and Raskin J P 2004 IEEE Sensors J. 4 670-80
7. Udrea F, Gardner J W, Setiadi D, Covington J A, Dogaru T, Lu C C and Milne W I 2001 Sensors actuators B 78 180-90
8. Pearce C W 1988 VLSI Technology 2nd edition ed Sze S M (New York: McGraw-Hill) p 9-54