Nucleation and growth of copper on ru-based substrates: I. The effect of the inorganic components

ECS Transactions

Volumn 41, Issue 35, 2012, Pages 75-82

  Nagar, M ^a,b   Vereecken, P M ^a,c   Strubbe, K ^b   Radisic, A ^a  

^a IMEC   (Belgium)

^b GHENT UNIVERSITY   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BATH COMPOSITIONS; COPPER SULFATE; DIRECT PLATING; INORGANIC COMPONENTS; ISLAND DENSITY; NUCLEATION AND GROWTH; OPTIMAL CONCENTRATION; POLYETHYLENE GLYCOL (PEG);

COALESCENCE; ELECTRODEPOSITION; METALLIZING; NANOSTRUCTURES; OPTIMIZATION; SUBSTRATES; THIN FILMS;

COPPER;

EID: 84864280959     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3699382     Document Type: Conference Paper

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