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Current Applied Physics

Volumn 12, Issue 6, 2012, Pages 1606-1610

Spectroscopic ellipsometry modeling of ZnO thin films with various O 2 partial pressures

(3) Cho, Edward Namkyu a Park, Suehye a Yun, Ilgu a

a Yonsei University (South Korea)

Author keywords

DC sputtering; O 2 partial pressure; Spectroscopic ellipsometry; ZnO

Indexed keywords

CRYSTALLINITIES; DC MAGNETRON SPUTTERING; DC SPUTTERING; GLASS SUBSTRATES; SI (100) SUBSTRATE; SPECTRAL REGION; STRUCTURAL AND OPTICAL PROPERTIES; THERMALLY OXIDIZED; ZNO; ZNO FILMS; ZNO THIN FILM;

ATOMIC FORCE MICROSCOPY; METALLIC FILMS; OPTICAL FILMS; REFRACTIVE INDEX; SPECTROSCOPIC ELLIPSOMETRY; SUBSTRATES; SURFACE ROUGHNESS; X RAY DIFFRACTION; ZINC OXIDE;

PARTIAL PRESSURE;

EID: 84863980441 PISSN: 15671739 EISSN: None Source Type: Journal
DOI: 10.1016/j.cap.2012.05.030 Document Type: Article

Times cited : (22)

References (21)

1
- 34249724977
- B.-Y. Oh, M.-C. Jeong, M.-H. Ham, and J.-M. Myoung Semicond. Sci. Technol. 22 2007 608
- (2007) Semicond. Sci. Technol. , vol.22 , pp. 608
- Oh, B.-Y.¹ Jeong, M.-C.² Ham, M.-H.³ Myoung, J.-M.⁴

2
- 0038685672
- J.B. Lee, H.J. Kim, S.G. Kim, C.S. Hwang, S.-H. Hong, Y.H. Shin, and N.H. Lee Thin Solid Films 435 2003 179
- (2003) Thin Solid Films , vol.435 , pp. 179
- Lee, J.B.¹ Kim, H.J.² Kim, S.G.³ Hwang, C.S.⁴ Hong, S.-H.⁵ Shin, Y.H.⁶ Lee, N.H.⁷

3
- 39549088302
- Q.H. Li, D. Zhu, W. Liu, Y. Lie, and X.C. Ma Appl. Surf. Sci. 254 2008 2922
- (2008) Appl. Surf. Sci. , vol.254 , pp. 2922
- Li, Q.H.¹ Zhu, D.² Liu, W.³ Lie, Y.⁴ Ma, X.C.⁵

4
- 9644257256
- R. Hong, H. Qi, J. Huang, H. He, Z. Fan, and J. Shao Thin Solid Films 473 2005 58
- (2005) Thin Solid Films , vol.473 , pp. 58
- Hong, R.¹ Qi, H.² Huang, J.³ He, H.⁴ Fan, Z.⁵ Shao, J.⁶

5
- 0036647871
- J.W. Elam, Z.A. Sechrist, and S.M. George Thin Solid Films 414 2002 43
- (2002) Thin Solid Films , vol.414 , pp. 43
- Elam, J.W.¹ Sechrist, Z.A.² George, S.M.³

6
- 0036301267
- J.-M. Myoung, W.-H. Yoon, D.-H. Lee, I. Yun, S.-H. Bae, and S.-Y. Lee Jpn. J. Appl. Phys. 41 2002 28
- (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 28
- Myoung, J.-M.¹ Yoon, W.-H.² Lee, D.-H.³ Yun, I.⁴ Bae, S.-H.⁵ Lee, S.-Y.⁶

7
- 0005820442
- S.A. Studenikin, N. Golego, and M. Cocivera J. Appl. Phys. 84 1998 2287
- (1998) J. Appl. Phys. , vol.84 , pp. 2287
- Studenikin, S.A.¹ Golego, N.² Cocivera, M.³

8
- 0032624139
- Y. Nakanishi, A. Miyake, H. Kominami, T. Aoki, Y. Hatanaka, and G. Shimaoka Appl. Surf. Sci. 142 1999 233
- (1999) Appl. Surf. Sci. , vol.142 , pp. 233
- Nakanishi, Y.¹ Miyake, A.² Kominami, H.³ Aoki, T.⁴ Hatanaka, Y.⁵ Shimaoka, G.⁶

9
- 0019073450
- C.R. Aita, A.J. Purdes, R.L. Lad, and P.D. Funkenbusch J. Appl. Phys. 51 1980 5533
- (1980) J. Appl. Phys. , vol.51 , pp. 5533
- Aita, C.R.¹ Purdes, A.J.² Lad, R.L.³ Funkenbusch, P.D.⁴

10
- 34548499917
- J.P. Zhang, G. He, L.Q. Zhu, M. Liu, S.S. Pan, and L.D. Zhang Appl. Surf. Sci. 253 2007 9414
- (2007) Appl. Surf. Sci. , vol.253 , pp. 9414
- Zhang, J.P.¹ He, G.² Zhu, L.Q.³ Liu, M.⁴ Pan, S.S.⁵ Zhang, L.D.⁶

11
- 73749085258
- N.H. Al-Hardan, M.J. Abdullah, A. Abdul Aziz, H. Ahmad, and M. Rashid Physica B 405 2010 1081
- (2010) Physica B , vol.405 , pp. 1081
- Al-Hardan, N.H.¹ Abdullah, M.J.² Abdul Aziz, A.³ Ahmad, H.⁴ Rashid, M.⁵

12
- 33646535605
- Y.C. Liu, J.H. Hsieh, and S.K. Tung Thin Solid Films 510 2006 32
- (2006) Thin Solid Films , vol.510 , pp. 32
- Liu, Y.C.¹ Hsieh, J.H.² Tung, S.K.³

13
- 15744378345
- H. Fujiwara, and M. Kondo Phys. Rev. B 71 2005 075109
- (2005) Phys. Rev. B , vol.71 , pp. 075109
- Fujiwara, H.¹ Kondo, M.²

14
- 79952533389
- T.C. Peng, X.H. Xiao, X.Y. Han, X.D. Zhou, W. Wu, F. Ren, and C.Z. Jiang Appl. Surf. Sci. 257 2011 5908
- (2011) Appl. Surf. Sci. , vol.257 , pp. 5908
- Peng, T.C.¹ Xiao, X.H.² Han, X.Y.³ Zhou, X.D.⁴ Wu, W.⁵ Ren, F.⁶ Jiang, C.Z.⁷

15
- 22944444544
- S.T. Tan, B.J. Chen, X.W. Sun, W.J. Fan, H.S. Kwok, X.H. Zhang, and S.J. Chua J. Appl. Phys. 98 2005 013505
- (2005) J. Appl. Phys. , vol.98 , pp. 013505
- Tan, S.T.¹ Chen, B.J.² Sun, X.W.³ Fan, W.J.⁴ Kwok, H.S.⁵ Zhang, X.H.⁶ Chua, S.J.⁷

16
- 67349206914
- N. Ekem, S. Korkmaz, S. Pat, M.Z. Balbag, E.N. Cetin, and M. Ozmumcu Int. J. Hydrogen Energy 34 2009 5218
- (2009) Int. J. Hydrogen Energy , vol.34 , pp. 5218
- Ekem, N.¹ Korkmaz, S.² Pat, S.³ Balbag, M.Z.⁴ Cetin, E.N.⁵ Ozmumcu, M.⁶

17
- 0031074701
- K.B. Sundaram, and A. Khan Thin Solid Films 295 1997 87
- (1997) Thin Solid Films , vol.295 , pp. 87
- Sundaram, K.B.¹ Khan, A.²

18
- 84957233558
- Y. Qu, T.A. Gessert, K. Ramanathan, R.G. Dhere, R. Noufi, and T.J. Coutts J. Vac. Sci. Technol. B 11 1993 996
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 996
- Qu, Y.¹ Gessert, T.A.² Ramanathan, K.³ Dhere, R.G.⁴ Noufi, R.⁵ Coutts, T.J.⁶

19
- 0036531450
- T.-W. Huang, H.-Y. Lee, Y.-W. Hseih, and C.-H. Lee J. Cryst. Growth 237-239 2002 492
- (2002) J. Cryst. Growth , vol.237-239 , pp. 492
- Huang, T.-W.¹ Lee, H.-Y.² Hseih, Y.-W.³ Lee, C.-H.⁴

20
- 11444257247
- Z.B. Fang, Z.J. Yan, Y.S. Tan, X.Q. Liu, and Y.Y. Wang Appl. Surf. Sci. 241 2005 303
- (2005) Appl. Surf. Sci. , vol.241 , pp. 303
- Fang, Z.B.¹ Yan, Z.J.² Tan, Y.S.³ Liu, X.Q.⁴ Wang, Y.Y.⁵

21
- 28444482366
- H.T. Fan, X.M. Teng, S.S. Pan, C. Ye, G.H. Li, and L.D. Zhang Appl. Phys. Lett. 87 2005 231916
- (2005) Appl. Phys. Lett. , vol.87 , pp. 231916
- Fan, H.T.¹ Teng, X.M.² Pan, S.S.³ Ye, C.⁴ Li, G.H.⁵ Zhang, L.D.⁶

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