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Volumn 51, Issue 17, 2012, Pages 3847-3852

Low-temperature atmospheric pressure argon plasma treatment and hybrid laser-plasma ablation of barite crown and heavy flint glass

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; ARGON; ATMOSPHERIC PRESSURE; BARITE; GLASS; LASER ABLATION; LASER BEAMS; LASER PRODUCED PLASMAS; PLASMA APPLICATIONS; PLASMA INTERACTIONS; SURFACE TREATMENT; TEMPERATURE;

EID: 84863740933     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.51.003847     Document Type: Article
Times cited : (24)

References (36)
  • 1
    • 43749114720 scopus 로고    scopus 로고
    • Efficient versatile-repetition-rate picosecond source for material processing applications
    • DOI 10.1364/AO.47.000967
    • C. Gerhard, F. Druon, P. Blandin, M. Hanna, F. Balembois, P. Georges, and F Falcoz, "Efficient versatile-repetition-rate picosecond source for material processing applications", Appl. Opt. 47, 967-974 (2008). (Pubitemid 351690586)
    • (2008) Applied Optics , vol.47 , Issue.7 , pp. 967-974
    • Gerhard, C.1    Druon, F.2    Blandin, P.3    Hanna, M.4    Balembois, F.5    Georges, P.6    Falcoz, F.7
  • 2
    • 0035965632 scopus 로고    scopus 로고
    • Femtosecond laser deep hole drilling of silicate glasses in air
    • DOI 10.1016/S0169-4332(01)00468-8, PII S0169433201004688
    • L. Shah, J. Tawney, M. Richardson, and K. Richardson, "Femtosecond laser deep hole drilling of silicate glasses in air", Appl. Surf. Sci. 183, 151-164 (2001). (Pubitemid 33080597)
    • (2001) Applied Surface Science , vol.183 , Issue.3-4 , pp. 151-164
    • Shah, L.1    Tawney, J.2    Richardson, M.3    Richardson, K.4
  • 3
    • 79956078753 scopus 로고    scopus 로고
    • Surface ablation of dielectrics with sub-10 fs to 300 fs laser pulses: Crater depth and diameter, and efficiency as a function of laser intensity
    • O. Utéza, N. Sanner, B. Chimier, M. Sentis, P. Lassonde, F Légaré, and J. C. Kieffer, "Surface ablation of dielectrics with sub-10 fs to 300 fs laser pulses: crater depth and diameter, and efficiency as a function of laser intensity", J. Laser Micro Nanoeng. 5, 238-241 (2010).
    • (2010) J. Laser Micro Nanoeng. , vol.5 , pp. 238-241
    • Utéza, O.1    Sanner, N.2    Chimier, B.3    Sentis, M.4    Lassonde, P.5    Légaré, F.6    Kieffer, J.C.7
  • 4
    • 0000754238 scopus 로고    scopus 로고
    • Femtosecondand nanosecond-pulse laser ablation of bariumalumoborosilicate glass
    • P. Rudolph, J. Bonse, J. Krüger, and W. Kautek, "Femtosecondand nanosecond-pulse laser ablation of bariumalumoborosilicate glass", Appl. Phys. A 69, S763-S766 (1999).
    • (1999) Appl. Phys. A , vol.69
    • Rudolph, P.1    Bonse, J.2    Krüger, J.3    Kautek, W.4
  • 5
    • 0343703840 scopus 로고
    • Nanosecond and femtosecond excimer laser ablation of fused silica
    • J. Ihlemann, B. Wolff, and P. Simon, "Nanosecond and femtosecond excimer laser ablation of fused silica", Appl. Phys. A 54, 363-368 (1992).
    • (1992) Appl. Phys. A , vol.54 , pp. 363-368
    • Ihlemann, J.1    Wolff, B.2    Simon, P.3
  • 6
    • 0000176798 scopus 로고    scopus 로고
    • High-quality and high-efficiency machining of glass materials by laser-induced plasma-assisted ablation using conventional nanosecond UV, visible, and infrared lasers
    • J. Zhang, K. Sugioka, and K. Midorikawa, "High-quality and high-efficiency machining of glass materials by laser-induced plasma-assisted ablation using conventional nanosecond UV, visible, and infrared lasers", Appl. Phys. A 69, S879-S882 (1999).
    • (1999) Appl. Phys. A , vol.69
    • Zhang, J.1    Sugioka, K.2    Midorikawa, K.3
  • 7
    • 14544300052 scopus 로고    scopus 로고
    • Precision glass machining, drilling and profile cutting by short pulse lasers
    • DOI 10.1016/j.tsf.2004.08.136, PII S0040609004012933, ICMAT 03
    • S. Nikumb, Q. Chen, C. Li, H. Reshef, H. Y. Zheng, H. Qiu, and D. Low, "Precision glass machining, drilling and profile cutting by short pulse lasers", Thin Solid Films 477, 216-221 (2005). (Pubitemid 40302796)
    • (2005) Thin Solid Films , vol.477 , Issue.1-2 , pp. 216-221
    • Nikumb, S.1    Chen, Q.2    Li, C.3    Reshef, H.4    Zheng, H.Y.5    Qiu, H.6    Low, D.7
  • 8
    • 0032529941 scopus 로고    scopus 로고
    • Direct fabrication of microgratings in fused quartz by laser-induced plasma-assisted ablation with a KrF excimer laser
    • J. Zhang, K. Sugioka, and K. Midorikawa, "Direct fabrication of microgratings in fused quartz by laser-induced plasmaassisted ablation with a KrF excimer laser", Opt. Lett. 23, 1486-1488 (1998). (Pubitemid 128590596)
    • (1998) Optics Letters , vol.23 , Issue.18 , pp. 1486-1488
    • Zhang, J.1    Sugioka, K.2    Midorikawa, K.3
  • 10
    • 0032794020 scopus 로고    scopus 로고
    • One-step microfabrication of fused silica by laser ablation of an organic solution
    • J. Wang, H. Niino, and A. Yabe, "One-step microfabrication of fused silica by laser ablation of an organic solution", Appl. Phys. A 68, 111-113 (1999).
    • (1999) Appl. Phys. A , vol.68 , pp. 111-113
    • Wang, J.1    Niino, H.2    Yabe, A.3
  • 12
    • 6344282355 scopus 로고    scopus 로고
    • Laser etching of fused silica using an adsorbed toluene layer
    • K. Zimmer, R. Böhme, and B. Rauschenbach, "Laser etching of fused silica using an adsorbed toluene layer", Appl. Phys. A 79, 1883-1885 (2004).
    • (2004) Appl. Phys. A , vol.79 , pp. 1883-1885
    • Zimmer, K.1    Böhme, R.2    Rauschenbach, B.3
  • 14
    • 84857287943 scopus 로고    scopus 로고
    • Near-surface modification of optical properties of fused silica by low-temperature hydrogenous atmospheric pressure plasma
    • C. Gerhard, D. Tasche, S. Brückner, S. Wieneke, and W Viöl, "Near-surface modification of optical properties of fused silica by low-temperature hydrogenous atmospheric pressure plasma", Opt. Lett. 37, 566-568 (2012).
    • (2012) Opt. Lett. , vol.37 , pp. 566-568
    • Gerhard, C.1    Tasche, D.2    Brückner, S.3    Wieneke, S.4    Viöl, W.5
  • 15
    • 84861740670 scopus 로고    scopus 로고
    • Hybrid laser-plasma micro-structuring of fused silica based on surface reduction by a lowtemperature atmospheric pressure plasma
    • S. Brückner, J. Hoffmeister, J. Ihlemann, C. Gerhard, S. Wieneke, and W Viöl, "Hybrid laser-plasma micro-structuring of fused silica based on surface reduction by a lowtemperature atmospheric pressure plasma", J. Laser Micro. Nanoeng. 7, 73-76 (2012).
    • (2012) J. Laser Micro. Nanoeng. , vol.7 , pp. 73-76
    • Brückner, S.1    Hoffmeister, J.2    Ihlemann, J.3    Gerhard, C.4    Wieneke, S.5    Viöl, W.6
  • 17
    • 33750705922 scopus 로고    scopus 로고
    • A new reactive atom plasma technology (RAPT) for precision machining: The etching of ULE surfaces
    • DOI 10.1002/adem.200600028
    • C. Fanara, P. Shore, J. R. Nicholls, N. Lyford, J. Kelley J. Carr, and P. Sommer, "A new reactive atom plasma technology (RAPT) for precision machining: the etching of ULE surfaces", Adv. Eng. Mater. 8, 933-939 (2006). (Pubitemid 44703688)
    • (2006) Advanced Engineering Materials , vol.8 , Issue.10 , pp. 933-939
    • Fanara, C.1    Shore, P.2    Nicholls, J.R.3    Lyford, N.4    Kelley, J.5    Carr, J.6    Sommer, P.7
  • 18
    • 25444466973 scopus 로고    scopus 로고
    • 6/Ar inductively coupled plasmas
    • DOI 10.1016/j.mee.2005.07.006, PII S0167931705003126
    • J. H. Parka, N.-E. Lee, J. Lee, J. S. Park, and H. D. Park, "Deepdry etching of borosilicate glass using SF6 and SF6/Ar inductively coupled plasmas", Microelectron. Eng. 82, 119-128 (2005). (Pubitemid 41375882)
    • (2005) Microelectronic Engineering , vol.82 , Issue.2 , pp. 119-128
    • Park, J.H.1    Lee, N.-E.2    Lee, J.3    Park, J.S.4    Park, H.D.5
  • 19
    • 0035128005 scopus 로고    scopus 로고
    • 6 plasma
    • DOI 10.1016/S0924-4247(00)00482-9
    • X. Li, T. Abe, and M. Esashi, "Deep reactive ion etching of Pyrex glass using SF6 plasma", Sens. Actuators A 87, 139-145 (2001). (Pubitemid 32131575)
    • (2001) Sensors and Actuators, A: Physical , vol.87 , Issue.3 , pp. 139-145
    • Li, X.1    Abe, T.2    Esashi, M.3
  • 20
    • 0033333977 scopus 로고    scopus 로고
    • 3 plasmas
    • DOI 10.1016/S0042-207X(99)00146-3
    • P. W Leech, "Reactive ion etching of quartz and silica-based glasses in CF4/CHF3 plasmas", Vacuum 55, 191-196 (1999). (Pubitemid 30544719)
    • (1999) Vacuum , vol.55 , Issue.3 , pp. 191-196
    • Leech, P.W.1
  • 21
    • 33744461560 scopus 로고    scopus 로고
    • Deep reactive ion etching of borosilicate glass using an anodically bonded silicon wafer as an etching mask
    • DOI 10.1088/0960-1317/16/5/024, PII S0960131706185733
    • T. Akashi and Y. Yoshimura, "Deep reactive ion etching of borosilicate glass using an anodically bonded silicon wafer as an etching mask", J. Micromech. Microeng. 16, 1051-1056 (2006). (Pubitemid 43797630)
    • (2006) Journal of Micromechanics and Microengineering , vol.16 , Issue.5 , pp. 1051-1056
    • Akashi, T.1    Yoshimura, Y.2
  • 22
    • 57249101899 scopus 로고    scopus 로고
    • Deep plasma etching of glass for fluidic devices with different mask materials
    • K. Kolari, V. Saarela, and S. Franssila, "Deep plasma etching of glass for fluidic devices with different mask materials", J. Micromech. Microeng. 18, 064010 (2008).
    • (2008) J. Micromech. Microeng. , vol.18 , pp. 064010
    • Kolari, K.1    Saarela, V.2    Franssila, S.3
  • 24
    • 0018469799 scopus 로고
    • Ion-and electron-assisted gas-surface chemistry - An important effect in plasma etching
    • DOI 10.1063/1.326355
    • J. W Coburn and H. F Winters, "Ion-and electron-assisted gas-surface chemistry-an important effect in plasma etching", J. Appl. Phys. 50, 3189-3196 (1979). (Pubitemid 10469931)
    • (1979) Journal of Applied Physics , vol.50 , Issue.5 , pp. 3189-3196
    • Coburn, J.W.1    Winters Harold, F.2
  • 25
    • 84863747763 scopus 로고    scopus 로고
    • Optical system design-software tools cover envelope calculations to the final engineering drawings
    • T. Thöniss, G. Adams, and C. Gerhard, "Optical system design-software tools cover envelope calculations to the final engineering drawings", Opt. Photonik 4, 30-33 (2009).
    • (2009) Opt. Photonik , vol.4 , pp. 30-33
    • Thöniss, T.1    Adams, G.2    Gerhard, C.3
  • 27
    • 0001900683 scopus 로고
    • The electric characteristics of the ozonator discharge
    • T. C. Manley "The electric characteristics of the ozonator discharge", ECS Trans. 84, 83-96 (1943).
    • (1943) ECS Trans. , vol.84 , pp. 83-96
    • Manley, T.C.1
  • 28
    • 72049090949 scopus 로고    scopus 로고
    • The acidification of lipid film surfaces by nonthermal DBD at atmospheric pressure in air
    • A. Helmke, D. Hoffmeister, N. Mertens, S. Emmert, J. Schuette, and W Viöl, "The acidification of lipid film surfaces by nonthermal DBD at atmospheric pressure in air", New J. Phys. 11, 115025 (2009).
    • (2009) New J. Phys. , vol.11 , pp. 115025
    • Helmke, A.1    Hoffmeister, D.2    Mertens, N.3    Emmert, S.4    Schuette, J.5    Viöl, W.6
  • 30
    • 84947883599 scopus 로고
    • Peel adhesion: Influence of surface energies and adhesive rheology
    • D. H. Kaelble, "Peel adhesion: influence of surface energies and adhesive rheology", J. Adhes. Sci. Technol. 1, 102-123 (1969).
    • (1969) J. Adhes. Sci. Technol. , vol.1 , pp. 102-123
    • Kaelble, D.H.1
  • 31
    • 0014551211 scopus 로고
    • Estimation of the surface free energy of polymers
    • D. K. Owens and R. C. Wendt, "Estimation of the surface free energy of polymers", J. Appl. Polym. Sci. 13, 1741-1747 (1969).
    • (1969) J. Appl. Polym. Sci. , vol.13 , pp. 1741-1747
    • Owens, D.K.1    Wendt, R.C.2
  • 33
    • 21644481419 scopus 로고    scopus 로고
    • Study of the Ar metastable atom population in a hollow cathode discharge by means of a hybrid model and spectrometric measurements
    • N. Baguer, A. Bogaerts, Z. Donko, R. Gijbels, and N. Sadeghi, "Study of the Ar metastable atom population in a hollow cathode discharge by means of a hybrid model and spectrometric measurements", J. Appl. Phys. 97, 123305 (2005).
    • (2005) J. Appl. Phys. , vol.97 , pp. 123305
    • Baguer, N.1    Bogaerts, A.2    Donko, Z.3    Gijbels, R.4    Sadeghi, N.5
  • 35
    • 67650303365 scopus 로고    scopus 로고
    • Spatially resolved measurements of argon metastable (1s5) density in a high pressure microdischarge using diode laser absorption spectroscopy
    • S. G. Belostotskiy V. M. Donnelly, D. J. Economou, and N. Sadeghi, "Spatially resolved measurements of argon metastable (1s5) density in a high pressure microdischarge using diode laser absorption spectroscopy", IEEE Trans. Plasma Sci. 37, 852-858 (2009).
    • (2009) IEEE Trans. Plasma Sci. , vol.37 , pp. 852-858
    • Belostotskiy, S.G.1    Donnelly, V.M.2    Economou, D.J.3    Sadeghi, N.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.