An electro-thermal MEMS gripper with large tip opening and holding force: Design and characterization

Sensors and Transducers

Volumn 13, Issue SPEC.ISSUE, 2011, Pages 31-43

  Khazaai, Jay J ^a   Qu, H ^a   Shillor, M ^a   Smith, L ^a  

^a OAKLAND UNIVERSITY   (United States)

Author keywords

Electro thermal; MEMS; MetalMUMPs; Micro actuator; Micro gripper

Indexed keywords

CONSUMING POWER; ELECTRO-THERMAL; ELECTROPLATED NICKEL; IN-PLANE DISPLACEMENT; LOW OPERATING VOLTAGE; METALLIC STRUCTURES; METALMUMPS; MICRO GRIPPER; OPERATING VOLTAGE; TIP DISPLACEMENT; V-SHAPE;

ACTUATORS; MEMS; MICROOPTICS; NICKEL PLATING;

GRIPPERS;

EID: 84863397778     PISSN: None     EISSN: 17265479     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (15)

1. Y. Zhao, T. Cui, Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique, Journal of Micromechanics and Microengineering, Vol. 13, 2003, pp. 430-5.
2. Q. Zhang, S. Gross, S. Tadigadapa, T. Jackson, F. Djuthet, S. Trolier-McKinstry, Lead zirconate titanate films for d33 mode cantilever actuators, Sensors and Actuators, A, 105, 2003, pp. 91-7.
3. H. Sehr, I. Tomlin, B. Huang, S. Beeby, A. Evans, A. Brunnschweiler, G. Ensell, C. Schabmueller, T. Niblock, Time constant and lateral resonances of thermal vertical bimorph actuators, Journal of Micromechanics and Microengineering, Vol. 12, 2002, pp. 410-3.
4. T. Moulton, G. Ananthasuresh, Micromechanical devices with embedded electro-thermal-compliant actuation, Sensors and Actuators, A, 90, 2001, pp. 38-48.
5. K. Lee, Y. Cho, Laterally driven electrostatic repulsive-force micro actuators using asymmetric field distribution, Journal of Microelectro Mechanical Systems, Vol. 10, 2001, pp. 128-36.
6. D. Bell, T. Lu, N. Fleck, MEMS actuators and sensors: observations on their performance and selection for purpose, Journal of Micromechanics and Microengineering, Vol. 15, 2005, pp. 153-164.
7. J. Khazaai, M. Khir, H. Qu, J. Slicker, Displacement Amplification and Latching Mechanism Using V-shape Actuators in Design of Electro-thermal MEMS Switches, IEEE Sensors Conference, 2010, pp. 1454.
8. J. Khazaai, M. Khir, H. Qu, J. Slicker, Design and Fabrication of a Low Power Electro-thermal V-shape Actuator with Large Displacement, NSTI-Nanotech, Vol. 2, 2010, pp. 681-684.
9. C. Kung, R. Chen, Fatigue Analysis of U-shaped Flexural Electro-Thermal Micro-Actuators, Journal of the Chinese Institute of Engineers, Vol. 28, No. 1, 2005, pp. 123-130.
10. Q. Huang, N. Shek Lee, Analysis and Design of Polysilicon Thermal Flexure Actuator, Journal of Micromechanics and Microengineering, Vol. 9, 1999, pp. 64-70.
11. K. Kim, E. Nilsen, T. Huang, Metallic Microgripper with SU-8 Adaptor as End-effectors for Heterogeneous Micro/Nano Assembly Applications, Microsystem Technologies, Vol. 10, 2004, pp. 689-693.
12. J. Crosby, Experimentally Matched Finite Element Modeling of Thermally Actuated SOI MEMS Micro-Grippers Using COMSOL Multiphysics, in Proceedings of the COMSOL Conference, 2009, Boston.
13. N. Chronis, L. Lee, Electrothermally Activated SU-8 Microgripper for Single Cell Manipulation in Solution, Journal of Microelectro mechanical Systems, Vol. 14, No. 4, 2005, p. 857.
14. T. Duc, G. Lau, J. Creemer, P. Sarro, Electrothermal Microgripper with Large Jaw Displacement and Integrated Force Sensors, Journal of Microelectro mechanical Systems, Vol. 17, No. 6, 2008, pp. 1546.
15. MEMSCAP Inc., MetalMUMPs Design Hand Book, www.memscap.com, Revision 2. 0.