Displacment amplification and latching mechanism using V-shape actuators in design of electro-thermal MEMS switches

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 1454-1459

  Khazaai, Jay J ^a   Haris, Mohd ^a   Qu, Hongwei ^a   Slicker, James ^b  

^a Oakland University   (United States)

^b MicroStar Technologies LLC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATING FORCES; CONTACT FORCES; DISPLACEMENT AMPLIFICATION; DRIVING VOLTAGES; ELECTRO-THERMAL ACTUATORS; IN-PLANE; LARGE DISPLACEMENTS; LATERAL FORCE; MEMS SWITCHES; OUT-OF-PLANE DISPLACEMENT; POWER CONSUMPTION; STRUCTURAL SYMMETRY; STRUCTURE FEATURES; SWITCH CONTACTS; V-SHAPE;

AMPLIFICATION; ELECTRIC SWITCHES; SENSORS;

ACTUATORS;

EID: 79951895649     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690374     Document Type: Conference Paper

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