Design and fabrication of a low power electro-thermal V-shape actuator with large displacement

Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010

Volumn 2, Issue , 2010, Pages 681-684

  Khazaai, Jay J ^a   Haris, M ^a   Khir, M ^a   Qu, Hongwei ^a   Slicker, James ^b  

^a Oakland University   (United States)

^b MicroStar Technologies LLC   (United States)

Author keywords

CoventorWare; Electro thermal actuators; Finite element analysis (FEA); Micro electro mechanical systems (MEMS); Modeling; PolyMUMPS

Indexed keywords

COVENTORWARE; ELECTRO-THERMAL ACTUATORS; FINITE ELEMENT ANALYSIS; MICROELECTROMECHANICAL SYSTEMS; MODELING; POLYMUMPS;

ACTUATORS; COMPUTER SIMULATION; FABRICATION; FINITE ELEMENT METHOD; FLUIDICS; MECHANICAL ENGINEERING; MECHANICS; MICROELECTROMECHANICAL DEVICES; SURFACE MICROMACHINING;

COMPOSITE MICROMECHANICS;

EID: 78049439107     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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5. PolyMUMPs Design Handbook, Version 11.0, www.memscap.com.