Fatigue analysis of U-shaped flexural electro-thermal micro-actuators

Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an

Volumn 28, Issue 1, 2005, Pages 123-130

  Kung, Chieh ^a   Chen, Rong Shen ^b  

^a FAR EAST UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Actuators; Fatgiue; Finite element analysis; MEMS

Indexed keywords

ELECTRIC POTENTIAL; ELECTROSTATICS; FATIGUE TESTING; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; SEMICONDUCTOR DEVICES; WEIBULL DISTRIBUTION;

APEX DISPLACEMENT; MEMS; MICROPOSITIONING; PRODUCT RELIABILITY;

MICROACTUATORS;

EID: 12844269255     PISSN: 02533839     EISSN: 21587299     Source Type: Journal    
DOI: 10.1080/02533839.2005.9670978     Document Type: Article

References (9)

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