Zn/O ratio and oxygen chemical state of nanocrystalline ZnO films grown at different temperatures

Chinese Physics B

Volumn 21, Issue 3, 2012, Pages

  Fan, Hai Bo ^a   Zheng, Xin Liang ^a   Wu, Si Cheng ^a   Liu, Zhi Gang ^a   Yao, He Bao ^a  

^a NORTHWEST UNIVERSITY   (China)

Author keywords

growth temperature; metal organic chemical vapour deposition; Zn O ratio; ZnO film

Indexed keywords

CHEMICAL STATE; CHEMICAL VAPOUR DEPOSITION; CRYSTAL QUALITIES; DESORPTION PROCESS; FILM PROPERTIES; LARGE DEVIATIONS; METAL-ORGANIC; MUTUAL DIFFUSION; NANOCRYSTALLINE ZNO; OXYGEN ATOM; PHOTOLUMINESCENCE PROPERTIES; PL PROPERTY; SI SUBSTRATES; SMALL SIZE; STOICHIOMETRIC RATIO; ZNO; ZNO FILMS; ZNO NANOCRYSTALLINE FILMS;

DESORPTION; EPITAXIAL FILMS; GROWTH TEMPERATURE; INDUSTRIAL CHEMICALS; METALLIC FILMS; ORGANIC CHEMICALS; OXYGEN; SUBSTRATES; SUPERCONDUCTING FILMS; VAPORS; ZINC; ZINC OXIDE;

ATOMS;

EID: 84863362951     PISSN: 16741056     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-1056/21/3/038101     Document Type: Article

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