메뉴 건너뛰기




Volumn 34, Issue 3 PART 2, 2006, Pages 825-833

Nonlocal effects in a bounded afterglow plasma with fast electrons

Author keywords

Afterglow plasma; Diffusion cooling; Electron energy distribution function (EEDF); Modeling; Near wall sheath; Stepwise excitation

Indexed keywords

AFTERGLOW PLASMA; ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); MODELING; NEAR-WALL SHEATH; STEPWISE EXCITATION;

EID: 33751564414     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2006.872338     Document Type: Conference Paper
Times cited : (25)

References (44)
  • 2
    • 84869200607 scopus 로고
    • Dissociative recombination of molecular ions in noble-gas plasmas
    • V. A. Ivanov, "Dissociative recombination of molecular ions in noble-gas plasmas," Sov. Phys.-Usp., vol. 35, pp. 17-36, 1992.
    • (1992) Sov. Phys.-Usp , vol.35 , pp. 17-36
    • Ivanov, V.A.1
  • 3
    • 79952437376 scopus 로고
    • Chemi-ionization processes
    • A. N. Klyucharev, "Chemi-ionization processes," Phys.-Usp., vol. 36, pp. 486-512, 1993.
    • (1993) Phys.-Usp , vol.36 , pp. 486-512
    • Klyucharev, A.N.1
  • 4
    • 0002310592 scopus 로고
    • Ionization and quenching of excited atoms with production of fast electrons
    • N. B. Kolokolov and A. B. Blagoev, "Ionization and quenching of excited atoms with production of fast electrons," Phys.-Usp., vol. 36, pp. 152-170, 1993.
    • (1993) Phys.-Usp , vol.36 , pp. 152-170
    • Kolokolov, N.B.1    Blagoev, A.B.2
  • 6
    • 40849103780 scopus 로고
    • Studies of electron-attachment at thermal energies using the flowing afterglow langmuir probe technique
    • D. Smith and P. Spanel, "Studies of electron-attachment at thermal energies using the flowing afterglow langmuir probe technique," Adv. At. Mol. Opt. Phys., vol. 32, pp. 307-343, 1994.
    • (1994) Adv. At. Mol. Opt. Phys , vol.32 , pp. 307-343
    • Smith, D.1    Spanel, P.2
  • 7
    • 0000434133 scopus 로고
    • Properties of an afterglow helium plasma
    • J. W. Poukey, J. B. Gerardo, and M. A. Gusinow, "Properties of an afterglow helium plasma," Phys. Rev., vol. 179, pp. 211-226, 1969.
    • (1969) Phys. Rev , vol.179 , pp. 211-226
    • Poukey, J.W.1    Gerardo, J.B.2    Gusinow, M.A.3
  • 9
    • 0030134012 scopus 로고    scopus 로고
    • Global models of pulse-power-modulated high-density, low-presssure discharges
    • M. A. Lieberman and S. Ashida, "Global models of pulse-power-modulated high-density, low-presssure discharges," Plasma Sources Sci. Technol., vol. 5, pp. 145-158, 1996.
    • (1996) Plasma Sources Sci. Technol , vol.5 , pp. 145-158
    • Lieberman, M.A.1    Ashida, S.2
  • 10
    • 0001645284 scopus 로고
    • Progress in the nonequilibrium vibrational kinetics of hydrogen in magnetic multicusp H-ion sources
    • C. Gorse, M. Capitelli, M. Bacal, J. Bretagne, and A. Lagana, "Progress in the nonequilibrium vibrational kinetics of hydrogen in magnetic multicusp H-ion sources," Chem. Phys., vol. 117, pp. 177-195, 1987.
    • (1987) Chem. Phys , vol.117 , pp. 177-195
    • Gorse, C.1    Capitelli, M.2    Bacal, M.3    Bretagne, J.4    Lagana, A.5
  • 11
    • 0031558889 scopus 로고    scopus 로고
    • The temporal decay of the diffusion-determined afterglow plasma of the positive column
    • T. Brauer, S. Gortchakov, D. Loffhagen, S. Pfau, and R. Winkler, "The temporal decay of the diffusion-determined afterglow plasma of the positive column," J. Phys. D, Appl. Phys., vol. 30, pp. 3223-3239, 1997.
    • (1997) J. Phys. D, Appl. Phys , vol.30 , pp. 3223-3239
    • Brauer, T.1    Gortchakov, S.2    Loffhagen, D.3    Pfau, S.4    Winkler, R.5
  • 12
    • 0035306751 scopus 로고    scopus 로고
    • Relaxation of the EEDF in the afterglow of N% microwave discharge including space-charge field effects
    • V. Guerra, P. A. Sa, and J. Loureiro, "Relaxation of the EEDF in the afterglow of N% microwave discharge including space-charge field effects," Phys. Rev. E, vol. 63, p. 046 404, 2001.
    • (2001) Phys. Rev. E , vol.63 , pp. 046-404
    • Guerra, V.1    Sa, P.A.2    Loureiro, J.3
  • 13
    • 0000586059 scopus 로고    scopus 로고
    • Modeling of nonlocal electron kinetics in a low-pressure afterglow plasma
    • R. R. Arslanbekov and A. A. Kudryavtsev, "Modeling of nonlocal electron kinetics in a low-pressure afterglow plasma," Phys. Rev. E., vol. 58, pp. 7785-7798, 1998.
    • (1998) Phys. Rev. E , vol.58 , pp. 7785-7798
    • Arslanbekov, R.R.1    Kudryavtsev, A.A.2
  • 14
    • 4243595182 scopus 로고    scopus 로고
    • R. R. Arslanbekov, A. A. Kudryavtsev, and L. D. Tsendin, Electron-distribution-function cutoff mechanism in a low-pressure afterglow, Phys. Rev. E, 64, p. 016 401(1-10), 2001.
    • R. R. Arslanbekov, A. A. Kudryavtsev, and L. D. Tsendin, "Electron-distribution-function cutoff mechanism in a low-pressure afterglow," Phys. Rev. E, vol. 64, p. 016 401(1-10), 2001.
  • 15
    • 41349089528 scopus 로고    scopus 로고
    • Experimental study of diffusive cooling of electrons in a pulsed inductively coupled plasma
    • A. Maresca, K. Orlov, and U. Kortshagen, "Experimental study of diffusive cooling of electrons in a pulsed inductively coupled plasma," Phys. Rev. E, vol. 65, p. 056 405, 2002.
    • (2002) Phys. Rev. E , vol.65 , pp. 056-405
    • Maresca, A.1    Orlov, K.2    Kortshagen, U.3
  • 16
    • 0001138011 scopus 로고
    • Electron kinetics in nonuniform glow discharge plasma
    • L. D. Tsendin, "Electron kinetics in nonuniform glow discharge plasma," Plasma Sources Sci. Technol., vol. 4, pp. 200-211, 1995.
    • (1995) Plasma Sources Sci. Technol , vol.4 , pp. 200-211
    • Tsendin, L.D.1
  • 17
    • 0348252370 scopus 로고    scopus 로고
    • High-pressure micro-discharges in etching and deposition applications
    • R. M. Sankaranand and K. P. Giapis, "High-pressure micro-discharges in etching and deposition applications," J. Phys. D, Appl. Phys., vol. 36, pp. 2914-2921, 2003.
    • (2003) J. Phys. D, Appl. Phys , vol.36 , pp. 2914-2921
    • Sankaranand, R.M.1    Giapis, K.P.2
  • 18
    • 6344269151 scopus 로고
    • Electron energy distribution, electron temperature, and stepwise excitation in afterglow plasma
    • V. I. Demidov and N. B. Kolokolov, "Electron energy distribution, electron temperature, and stepwise excitation in afterglow plasma," Phys. Lett. A, vol. 89, pp. 397-400, 1982.
    • (1982) Phys. Lett. A , vol.89 , pp. 397-400
    • Demidov, V.I.1    Kolokolov, N.B.2
  • 19
    • 10944271735 scopus 로고    scopus 로고
    • Effect of vmetastable atoms on near-wall voltage drop in the afterglow of a noble-gas radio-frequency inductive coupled plasma
    • V. I. Demidov, C. A. DeJoseph, Jr., and A. A. Kudryavtsev, "Effect of vmetastable atoms on near-wall voltage drop in the afterglow of a noble-gas radio-frequency inductive coupled plasma," Phys. Plasmas vol. 11, pp. 5350-5353, 2004.
    • (2004) Phys. Plasmas , vol.11 , pp. 5350-5353
    • Demidov, V.I.1    DeJoseph Jr., C.A.2    Kudryavtsev, A.A.3
  • 20
    • 0007895105 scopus 로고
    • Electron spectra from slow collisions of excited noble gas atoms
    • A. Z. Devdariani, V. I. Demidov, N. B. Kolokolov, and V. I. Rubtsov, "Electron spectra from slow collisions of excited noble gas atoms," Sov. Phys.-JETP, vol. 57, pp. 960-964, 1983.
    • (1983) Sov. Phys.-JETP , vol.57 , pp. 960-964
    • Devdariani, A.Z.1    Demidov, V.I.2    Kolokolov, N.B.3    Rubtsov, V.I.4
  • 21
    • 0028517655 scopus 로고
    • Interaction processes with creation of fast electrons in the low temperature plasma
    • A. B. Blagoev, N. B. Kolokolov, and A. A. Kudrjavtsev, "Interaction processes with creation of fast electrons in the low temperature plasma," Physica Scripta, vol. 50, pp. 371-402, 1994.
    • (1994) Physica Scripta , vol.50 , pp. 371-402
    • Blagoev, A.B.1    Kolokolov, N.B.2    Kudrjavtsev, A.A.3
  • 22
    • 0013334977 scopus 로고
    • Formation of presheath and current-free double layer in a two-electron-temperature plasma
    • K. Sato and F. Miyawaki, "Formation of presheath and current-free double layer in a two-electron-temperature plasma," Phys. Fluids B vol. 4, pp. 1247-1254, 1992.
    • (1992) Phys. Fluids B , vol.4 , pp. 1247-1254
    • Sato, K.1    Miyawaki, F.2
  • 23
    • 0007042399 scopus 로고
    • Electron energy distribution functions in an afterglow plasma. V. Charged-particle diffusion and the distribution function
    • V. I. Demidov and N. B. Kolokolov, "Electron energy distribution functions in an afterglow plasma. V. Charged-particle diffusion and the distribution function," Sov. Phys.-Tech. Phys., vol. 25, pp. 338-343, 1980.
    • (1980) Sov. Phys.-Tech. Phys , vol.25 , pp. 338-343
    • Demidov, V.I.1    Kolokolov, N.B.2
  • 24
    • 10944240136 scopus 로고
    • Electron energy distribution and potential drop near the wall in a plasma with fast-electron sources
    • V. I. Demidov, N. B. Kolokolov, and O. G. Toronov, "Electron energy distribution and potential drop near the wall in a plasma with fast-electron sources," Sov. J. Plasma Phys., vol. 12, pp. 402-405, 1986.
    • (1986) Sov. J. Plasma Phys , vol.12 , pp. 402-405
    • Demidov, V.I.1    Kolokolov, N.B.2    Toronov, O.G.3
  • 25
    • 28844459324 scopus 로고    scopus 로고
    • Anomalously high near-wall sheath potential drop in a plasma with nonlocal fast electrons
    • C. A. DeJoseph, Jr., V. I. Demidov, and A. A. Kudryavtsev, "Anomalously high near-wall sheath potential drop in a plasma with nonlocal fast electrons," Phys. Rev. Lett., vol. 95, p. 215 002, 2005.
    • (2005) Phys. Rev. Lett , vol.95 , pp. 215-002
    • DeJoseph Jr., C.A.1    Demidov, V.I.2    Kudryavtsev, A.A.3
  • 26
    • 18744394893 scopus 로고    scopus 로고
    • Electric probes for plasmas: The link between theory and instrument
    • V. I. Demidov, S. V. Ratynskaia, and K. Rypdal, "Electric probes for plasmas: The link between theory and instrument," Rev. Sci. Instrum. vol. 73, pp. 3409-3439, 2002.
    • (2002) Rev. Sci. Instrum , vol.73 , pp. 3409-3439
    • Demidov, V.I.1    Ratynskaia, S.V.2    Rypdal, K.3
  • 27
    • 0029354709 scopus 로고
    • The Bohm criterion and boundary conditions for amulticomponent sistems
    • K.-U. Riemann, "The Bohm criterion and boundary conditions for amulticomponent sistems," IEEE Trans. Plasma Phys., vol. 23, pp. 709-716, 1995.
    • (1995) IEEE Trans. Plasma Phys , vol.23 , pp. 709-716
    • Riemann, K.-U.1
  • 28
    • 0035576380 scopus 로고    scopus 로고
    • Unipolar ion sheath
    • K.-U. Riemann and L. Tsendin, "Unipolar ion sheath," J. Appl. Phys. vol. 90, pp. 5487-5490, 2001.
    • (2001) J. Appl. Phys , vol.90 , pp. 5487-5490
    • Riemann, K.-U.1    Tsendin, L.2
  • 29
    • 0344946238 scopus 로고    scopus 로고
    • The plasma-sheath boundary region
    • R. N. Franklin, "The plasma-sheath boundary region," J. Phys. D, Appl. Phys., vol. 36, pp. R309-R320, 2003.
    • (2003) J. Phys. D, Appl. Phys , vol.36
    • Franklin, R.N.1
  • 30
    • 3242711555 scopus 로고    scopus 로고
    • Structure of collisional and collisionless sheath: Closed expressions for sheath thickness
    • A. Kono, "Structure of collisional and collisionless sheath: Closed expressions for sheath thickness," J. Phys. D, Appl. Phys., vol. 37, pp. 1945-1953, 2004.
    • (2004) J. Phys. D, Appl. Phys , vol.37 , pp. 1945-1953
    • Kono, A.1
  • 31
    • 0023296147 scopus 로고
    • Study of elastic electron collisions by plasma electron spectroscopy
    • V. I. Demidov and N. B. Kolokolov, "Study of elastic electron collisions by plasma electron spectroscopy," Sov. Phys. J., vol. 30, pp. 97-99, 1987.
    • (1987) Sov. Phys. J , vol.30 , pp. 97-99
    • Demidov, V.I.1    Kolokolov, N.B.2
  • 32
    • 27144447678 scopus 로고    scopus 로고
    • Spectroscopic study of the pulsed argon RF ICP discharge: Stepwise excitation in the afterglow and its application in optical spectroscopy
    • C. A. DeJoseph, Jr. and V. I. Demidov, "Spectroscopic study of the pulsed argon RF ICP discharge: Stepwise excitation in the afterglow and its application in optical spectroscopy," J. Phys. B: At. Mol. Opt. Phys., vol. 38, pp. 3805-3814, 2005.
    • (2005) J. Phys. B: At. Mol. Opt. Phys , vol.38 , pp. 3805-3814
    • DeJoseph Jr., C.A.1    Demidov, V.I.2
  • 33
    • 0342420603 scopus 로고    scopus 로고
    • Time-resolved current and voltage measurements on a pulsed RF inductively coupled plasma
    • W. Guo and C. A. De Joseph, Jr., "Time-resolved current and voltage measurements on a pulsed RF inductively coupled plasma," Plasma Sources Sci. Technol., vol. 10, pp. 43-51, 2001.
    • (2001) Plasma Sources Sci. Technol , vol.10 , pp. 43-51
    • Guo, W.1    De Joseph Jr., C.A.2
  • 34
    • 26444617184 scopus 로고    scopus 로고
    • Diode calibration of a Langmuir probe system for measurements of electron energy distribution functions in a plasma
    • C. A. De Joseph, Jr. and V. I. Demidov, "Diode calibration of a Langmuir probe system for measurements of electron energy distribution functions in a plasma," Rev. Sci. Instrum., vol. 76, p. 086 105, 2005.
    • (2005) Rev. Sci. Instrum , vol.76 , pp. 086-105
    • De Joseph Jr., C.A.1    Demidov, V.I.2
  • 35
    • 0032204765 scopus 로고    scopus 로고
    • Effect of metastable atoms on the electron energy probability functions in afterglows
    • L. J. Overzet and J. Kleber, "Effect of metastable atoms on the electron energy probability functions in afterglows," Plasma Sources Sci. Technol., vol. 7, pp. 512-523, 1998.
    • (1998) Plasma Sources Sci. Technol , vol.7 , pp. 512-523
    • Overzet, L.J.1    Kleber, J.2
  • 36
    • 3743131256 scopus 로고
    • Excited atoms and diffusion cooling of electrons in plasmas
    • N. B. Kolokolov, A. A. Kudryavtsev, and O. G. Toronov, "Excited atoms and diffusion cooling of electrons in plasmas," Sov. Phys.-Tech. Phys., vol. 30, pp. 1128-1132, 1985.
    • (1985) Sov. Phys.-Tech. Phys , vol.30 , pp. 1128-1132
    • Kolokolov, N.B.1    Kudryavtsev, A.A.2    Toronov, O.G.3
  • 37
    • 28844450340 scopus 로고    scopus 로고
    • Modification of a nonlocal electron energy distribution in a bounded plasma
    • C. A. De Joseph, Jr., V. I. Demidov, and A. A. Kudryavtsev, "Modification of a nonlocal electron energy distribution in a bounded plasma," Phys. Rev. E, vol. 72, p. 036 410, 2005.
    • (2005) Phys. Rev. E , vol.72 , pp. 036-410
    • De Joseph Jr., C.A.1    Demidov, V.I.2    Kudryavtsev, A.A.3
  • 39
    • 10944263598 scopus 로고
    • Electron velocity distribution and potential drop near the wall in the cathode plasma of an electric discharge
    • V. I. Demidov, N. B. Kolokolov, A. P. Mezentsev, and A. S. Mustafaev, "Electron velocity distribution and potential drop near the wall in the cathode plasma of an electric discharge," Sov. J. Plasma Phys., vol. 12, pp. 866-868, 1986.
    • (1986) Sov. J. Plasma Phys , vol.12 , pp. 866-868
    • Demidov, V.I.1    Kolokolov, N.B.2    Mezentsev, A.P.3    Mustafaev, A.S.4
  • 40
    • 36149017288 scopus 로고
    • Diffusion cooling of electrons in ionized gases
    • M. A. Biondi, "Diffusion cooling of electrons in ionized gases," Phys. Rev., vol. 93, pp. 1136-1140, 1954.
    • (1954) Phys. Rev , vol.93 , pp. 1136-1140
    • Biondi, M.A.1
  • 41
    • 0015327014 scopus 로고
    • Diffusion cooling of electrons in afterglow plasma
    • A. K. Bhattacharya and J. H. Ingold, "Diffusion cooling of electrons in afterglow plasma," J. Appl. Phys., vol. 43, pp. 1535-1542, 1972.
    • (1972) J. Appl. Phys , vol.43 , pp. 1535-1542
    • Bhattacharya, A.K.1    Ingold, J.H.2
  • 42
    • 4243065047 scopus 로고
    • Electron temperature relaxation in afterglow plasmas: Diffusion cooling
    • D. Trunec, P. Spanel, and D. Smith, "Electron temperature relaxation in afterglow plasmas: Diffusion cooling," Contrib. Plasma Phys., vol. 34, pp. 69-79, 1994.
    • (1994) Contrib. Plasma Phys , vol.34 , pp. 69-79
    • Trunec, D.1    Spanel, P.2    Smith, D.3
  • 43
    • 18144400982 scopus 로고    scopus 로고
    • Electron impact excitation out of metastable levels of kripton
    • R. O. Jung, T. E. Stone, J. B. Boffard, L. W. Anderson, and C. C. Lin, "Electron impact excitation out of metastable levels of kripton," Phys. Rev. Lett., vol. 94, p. 163 202, 2005.
    • (2005) Phys. Rev. Lett , vol.94 , pp. 163-202
    • Jung, R.O.1    Stone, T.E.2    Boffard, J.B.3    Anderson, L.W.4    Lin, C.C.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.