Atomic layer deposition of Y2O3/ZrO2 nanolaminates: A route to ultrathin solid-state electrolyte membranes

Electrochemical and Solid-State Letters

Volumn 10, Issue 10, 2007, Pages

  Ginestra, Cynthia N ^a   Sreenivasan, Raghavasimhan ^a   Karthikeyan, Annamalai ^b   Ramanathan, Shriram ^b   McIntyre, Paul C ^a,c  

^a Stanford University   (United States)

^b HARVARD UNIVERSITY   (United States)

^c ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC LAYER DEPOSITION; DEPTH PROFILING; ELECTRIC CONDUCTIVITY; POLYCRYSTALLINE MATERIALS;

INTERDIFFUSION; NANOLAMINATES; YTTRIA-ZIRCONIA ALLOYS;

YTTRIA STABILIZED ZIRCONIA;

EID: 34547841493     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2759606     Document Type: Article

References (16)

1. R. W. Lashway, MRS Bull., 30, 581 (2005).
2. H. Yokokawa, N. Sakai, T. Horita, K. Yamaji, and M. E. Brito, MRS Bull., 30, 591 (2005).
3. S. C. Singhal, MRS Bull., 25, 16 (2000).
4. C. Bernay, A. Ringued́, P. Colomban, D. Lincot, and M. Cassir, J. Phys. Chem. Solids, 64, 1761 (2003).
5. R. L. Puurunen, J. Appl. Phys., 97, 12 (2005).
6. H. S. Kim, P. C. McIntyre, and K. C. Saraswat, J. Mater. Res., 19, 2 (2004).
7. M. Kilo, M. A. Taylor, Ch. Argirusis, G. Borchardt, B. Lesage, S. Scherrer, H. Scherrer, M. Schroeder, and M. Martin, J. Appl. Phys., 94, 7547 (2003).
8. T. Lee and A. Navrotsky, J. Mater. Res., 18, 908 (2003).
9. A. B. Belonoshko, G. Gutierrez, R. Ahuja, and B. Johansson, Phys. Rev. B, 64, 184103 (2001).
10. M. Fevre, A. Finel, and R. Caudron, Phys. Rev. B, 72, 104 (2005).
11. S. Badwal, Solid State Ionics, 52, 23 (1992).
12. J. S. Lee, T. J. Chung, and D. Y. Kim, Solid State Ionics, 136, 39 (2000).
13. I. Kosacki, T. Suzuki, V. Petrovsky, and H. Anderson, Solid State Ionics, 136-137, 1225 (2000).
14. A. Karthikeyan, C. L. Chang, and S. Ramanathan, Appl. Phys. Lett., 89, 183116 (2006).
15. L. Marsella and V. Fiorentini, Phys. Rev. B, 69, 172103 (2004).
16. W. Puin, S. Rodewald, R. Ramlau, P. Heitjans, and J. Maier, Solid State Ionics, 131, 159 (2000).