Single-step direct laser fabrication of complex shaped microoptical components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8428, Issue , 2012, Pages

  Žukauskas, Albertas ^a   Tikuišis, Kristupas K ^a   Ščiuka, Mindaugas ^a   Melninkaitis, Andrius ^a   Gadonas, Roaldas ^a   Reinhardt, Carsten ^b   Malinauskas, Mangirdas ^a  

^a VILNIUS UNIVERSITY   (Lithuania)

^b LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

3D microfabrication; Complex shape microoptical elements; Direct laser writing; Laser damage; LIDT; Sol gel materials

Indexed keywords

3D MICRO-FABRICATION; DIRECT LASER WRITING; LIDT; MICRO-OPTICAL ELEMENTS; SOL-GEL MATERIALS;

LASER DAMAGE; SOL-GELS;

THREE DIMENSIONAL;

EID: 84861820889     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.921994     Document Type: Conference Paper

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