Direct laser writing of microoptical structures using a Ge-containing hybrid material

Metamaterials

Volumn 5, Issue 2-3, 2011, Pages 135-140

  Malinauskas, Mangirdas ^a,b   Gaidukevičiute, Arune ^b   Purlys, Vytautas ^a,b   Žukauskas, Albertas ^a   Sakellari, Ioanna ^b   Kabouraki, Elmina ^c   Candiani, Alessandro ^b   Gray, David ^b   Pissadakis, Stavros ^b   Gadonas, Roaldas ^a   Piskarskas, Algis ^a   Fotakis, Costas ^b   Vamvakaki, Maria ^b,c   Farsari, Maria ^b  

^a VILNIUS UNIVERSITY   (Lithuania)

^b INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

^c UNIVERSITY OF CRETE   (Greece)

Author keywords

Fiber optics; Germanium; Hybrid materials; Integrated systems; Laser 3D nanofabrication; Microoptics; Multifunctional devices; Polymerization

Indexed keywords

ASPHERIC LENS; DIRECT LASER WRITING; HYBRID SOL-GEL; IN-FIBER; INTEGRATED SYSTEMS; LIGHT FLOW; MICRO-OPTICAL COMPONENTS; MICRO-OPTICAL STRUCTURE; MICRO-SCALES; MULTIFUNCTIONAL DEVICES; NM RESOLUTION; OPTICAL APPLICATIONS; OPTICAL PERFORMANCE; THREE-DIMENSIONAL STRUCTURE;

FIBER OPTICS; FUNCTIONAL MATERIALS; GERMANIUM; GLASS LASERS; MICROOPTICS; POLYMERIZATION; THREE DIMENSIONAL;

HYBRID MATERIALS;

EID: 80053132078     PISSN: 18731988     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.metmat.2011.04.002     Document Type: Article

References (27)

1. Sun H., Kawata S. Multi-photon photopolymerization and 3d lithographic microfabrication. Adv. Polym. Sci. 2004, 170:169-273.
2. Ovsianikov A., Chichkov B.N. Nanoelectronics and Photonics: From Atoms to Materials, Devices and Architectures Nanostructure Science and Technology 2008, Springer, New York, pp. 427-446.
3. Serbin J., Ovsianikov A., Chichkov B.N. Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties. Opt. Express 2004, 12:5221-5228.
4. Nguyen L.H., Straub M., Gu M. Acrylate-based photopolymer for two-photon microfabrication and photonic applications. Adv. Funct. Mater. 2005, 15:209-216.
5. Houbertz R., Frohlich L., Popall M., Streppel U., Dannberg P., Brauer A., Serbin J., Chichkov B.N. Inorganic-organic hybrid polymers for information technology: from planar technology to 3D nanostructures. Adv. Eng. Mater. 2003, 5:551-555.
6. Ovsianikov A., Viertl J., Chichkov B.N., Oubaha M., MacCraith B., Sakellari I., Giakoumaki A., Gray D., Vamvakaki M., Farsari M., Fotakis C. Ultra-low shrinkage hybrid photosensitive material for two-photon polymerization microfabrication. ACS Nano 2008, 2:2257-2262.
7. Buestrich R., Kahlenberg F., Popall M., Muller-Fiedler R., Rosch O. ORMOCERs for optical interconnection technology. J. Sol-Gel Sci. Technol. 2001, 20:181-186.
8. Sakellari I., Gaidukeviciute A., Giakoumaki A., Gray D., Fotakis C., Farsari M., Vamvakaki M., Reinhardt C., Ovsianikov A., Chichkov B. Two-photon polymerization of titanium sol-gel containing composites for three-dimensional structure fabrication. Appl. Phys. A 2010, 100:359-364.
9. Jang J.H., Kang D.J., Bae B.-S. Direct photo-imprinting in high photosensitive organically modified germanosilicate (ORMOGSIL) glasses. Proc. Mater. Res. Soc. Symp. 2003, 780:Y5.10.
10. 2-contained organic-inorganic hybrid sol-gel films for photonic applications. Opt. Express 2008, 16:3490-3495.
11. Messina F., Cannas M., Medjahdi K., Boukenter A., Ouerdane Y. UV-photoinduced defects in Ge-doped optical fibers. Proc. IEEE/LEOS 2005, 313-317.
12. Liberale C., Cojoc G., Candeloro P., Das G., Gentile F., De Angelis F., Di Fabrizio E. Micro-optics fabrication on top of optical fibers using two-photon lithography. IEEE Photonic Tech. Lett. 2010, 22:474-476.
13. Malinauskas M., Žukauskas A., Purlys V., Belazaras K., Momot A., Paipulas D., Gadonas R., Piskarskas A., Gilbergs H., Gaidukevičiute A., Sakellari I., Farsari M., Juodkazis S. Femtosecond laser polymerization of hybrid/integrated micro-optical elements and their characterization. J. Opt. 2010, 12:124010.
14. Seet K.K., Juodkazis S., Jarutis V., Misawa H. Feature-size reduction of photopolymerized structures by femtosecond optical curing of SU-8. Appl. Phys. Lett. 2006, 89:024106.
15. Thiel M., Fischer J., von Freymann G., Wegener M. Direct laser writing of three-dimensional submicron structures using a continuous-wave laser at 532nm. Appl. Phys. Lett. 2010, 97:221102.
16. Guo R., Xiao S., Zhai X., Li J., Xia A., Huang W. Micro lens fabrication by means of femtosecond two photon photopolymerization. Opt. Express 2006, 14:810-816.
17. Li Y., Yu Y., Guo L., Wu S., Chen C., Niu L., Li A., Yang H. High efficiency multilevel phase-type fresnel zone plates produced by multi-photon polymerization of SU-8. J. Opt. 2010, 12:035203.
18. Brasselet E., Malinauskas M., Žukauskas A., Juodkazis S. Photopolymerized microscopic vortex beam generators: precise delivery of optical orbital angular momentum. Appl. Phys. Lett. 2010, 97:211108.
19. Liu Z.-P., Li Y., Xiao Y.-F., Li B.-B., Jiang X.-F., Qin Y., Feng X.-B., Yang H., Gong Q. Direct laser writing of whispering gallery microcavities by two-photon polymerization. Appl. Phys. Lett. 2010, 97:211105.
20. Xing J.-F., Dong X.-Z., Chen W.-Q., Duan X.-M. Improving spatial resolution of two-photon microfabrication by using photoinitiator with high initiating efficiency. Appl. Phys. Lett. 2007, 90:131106.
21. Monneret S., Huguet-Chantôme P., Flory F. m-Lines technique: prism coupling measurement and discussion of accuracy for homogeneous waveguides. J. Opt. A: Pure Appl. Opt. 2000, 2:188-195.
22. Malinauskas M., Gilbergs H., Žukauskas A., Purlys V., Paipulas D., Gadonas R. A femtosecond laser-induced two-photon photopolymerization technique for structuring microlenses. J. Opt. 2010, 12:035204.
23. Malinauskas M., Žukauskas A., Bičkauskaite G., Gadonas R., Juodkazis S. Mechanisms of three-dimensional structuring of photo-polymers by tightly focussed femtosecond laser pulses. Opt. Express 2010, 18:10209-10221.
24. Farsari M., Vamvakaki M., Chichkov B.N. Multiphoton polymerization of hybrid materials. J. Opt. 2010, 12:124001.
25. Zhang Y.-L., Chen Q.-D., Xia H., Sun H.-B. Designable 3D nanofabrication by femtosecond laser direct writing. Nano Today 2010, 5(4):35-448.
26. Takada K., Sun H.-B., Kawata S. Improved spatial resolution and surface roughness in photopolymerizationbased laser nanowriting. Appl. Phys. Lett. 2005, 86:071122.
27. Malinauskas M., Bičkauskaite G., Rutkauskas M., Paipulas D., Purlys V., Gadonas R. Self-polymerization of nano-fibres and nano-membranes induced by two-photon absorption. Lith. J. Phys. 2010, 50:135-140.