Large-area microlens arrays fabricated on flexible polycarbonate sheets via single-step laser interference ablation

Journal of Micromechanics and Microengineering

Volumn 21, Issue 1, 2011, Pages

  Rui, Guo ^a   Dajun, Yuan ^a   Das, Suman ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COST PRODUCTION; DEEP-UV; FLEXIBLE PLASTIC SUBSTRATES; LASER INTERFERENCE; MICRO-LENS ARRAYS; NANOFABRICATION; OPTICAL IMAGING; POLYCARBONATE SHEETS; PULSED LASER; PULSED LASER INTERFERENCE; SINGLE-STEP; SINGLE-STEP METHOD; SUBMICROMETERS; SURFACE QUALITIES;

ABLATION; ATOMIC FORCE MICROSCOPY; FABRICATION; MICROLENSES; MICROMETERS; MICROOPTICS; OPTICAL INSTRUMENT LENSES; SCANNING ELECTRON MICROSCOPY;

PULSED LASERS;

EID: 78651504101     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/1/015010     Document Type: Article

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