Improved spatial resolution and surface roughness in photopolymerization- based laser nanowriting

Applied Physics Letters

Volumn 86, Issue 7, 2005, Pages 1-3

  Takada, Kenji ^a   Sun, Hong Bo ^a,b   Kawata, Satoshi ^a,b,c  

^a OSAKA UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c RIKEN   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CROSSLINKING; LASER PULSES; PHOTOPOLYMERIZATION; QUENCHING; RESINS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS;

LASER NANOWRITING; LASER PULSE ENERGY; PHOTON FLUX DENSITY; SPATIAL RESOLUTION;

NANOTECHNOLOGY;

EID: 17044396400     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1864249     Document Type: Article

References (16)

1. S. Maruo, O. Nakamura, and S. Kawata, Opt. Lett. 22, 132 (1997).
2. H.-B. Sun, S. Matsuo, and H. Misawa, Appl. Phys. Lett. 74, 786 (1999).
3. J. R. Qiu, Chem. Record 4, 50 (2004).
4. H.-B. Sun, Y. Xu, S. Juodkazis, K. Sun, M. Watanabe, S. Matsuo, H. Misawa, and J. Nishii, Opt. Lett. 26, 325 (2001).
5. K. Kaneko, H.-B. Sun, X.-M. Duan, and S. Kawata, Appl. Phys. Lett. 84, 2091 (2003).
6. C. M. Soukoulis, Photonic Crystals and Light Localization in the 21st Century, NATO Science Series, Ser. 3, Vol. 563 (Kluwer Academic, Dordrecht, 2000).
7. F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. D. Zhang, S. R. Marder, and J. W. Perry, Adv. Mater. (Weinheim, Ger.) 14, 194 (2002).
8. S. Yokoyama, T. Nakahama, M. Miki, and S. Mashiko, Appl. Phys. Lett. 82, 3221 (2003).
9. J. Kato, N. Takeyasu, Y. Adachi, H.-B. Sun, and S. Kawata, Appl. Phys. Lett. 86, 044102 (2005).
10. S. Kawata, H.-B. Sun, T. Tanaka, and T. Kenji, Nature (London) 412, 697 (2001).
11. T. Tanaka, H.-B. Sun, and S. Kawata, Appl. Phys. Lett. 80, 312 (2002).
12. C. Decker and K. Moussa, Makromol. Chem. 189, 2381 (1988).
13. H.-B. Sun, T. Suwa, K. Takada, R. P. Zaccaria, M. S. Kim, K.-S. Lee, and S. Kawata, Appl. Phys. Lett. 85, 3708 (2004).
14. H.-B. Sun, T. Tanaka, and H.-B. Sun, Appl. Phys. Lett. 80, 3673 (2002).
15. D. I. Bower, An Introduction to Polymer Physics (Cambridge University Press, Cambridge, 2002).
16. H.-B. Sun, K. Takada, M. S. Kim, K. S. Lee, and S. Kawata, Appl. Phys. Lett. 83, 1104 (2003).