Effect of surface tension and coefficient of thermal expansion in 30nm scale nanoimprinting with two flexible polymer molds

Nanotechnology

Volumn 23, Issue 23, 2012, Pages

  Kim, Jae Kwan ^a   Cho, Hye Sung ^a   Jung, Ho Sup ^a   Lim, Kipil ^a   Kim, Ki Bum ^a   Choi, Dae Geun ^b   Jeong, Jun Ho ^b   Suh, Kahp Yang ^a,c  

^a Seoul National University   (South Korea)

^b Korea Institute of Machine and Materials   (South Korea)

^c Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMBINED EFFECT; DEMOLDING; FLEXIBLE POLYMERS; MOLD MATERIALS; NANO-IMPRINTING; NANOPATTERNING; PERFLUOROPOLYETHERS; PMMA FILMS; POLAR COMPONENTS; POLYMER MOLDS; POLYMER THIN FILMS; POLYURETHANE ACRYLATES; PROCESSING CONDITION; ROOM TEMPERATURE; SCALE RESOLUTION; ULTRA-VIOLET; UV CURABLE POLYMER;

CURING; DELAMINATION; MOLDS; NANOIMPRINT LITHOGRAPHY; POLYMER FILMS; SURFACE PROPERTIES; SURFACE TENSION;

POLYMERS;

NANOMATERIAL; POLYMER;

ARTICLE; CHEMISTRY; CONFORMATION; CRYSTALLIZATION; HEAT; MACROMOLECULE; MATERIALS TESTING; METHODOLOGY; MOLECULAR IMPRINTING; PARTICLE SIZE; SURFACE PROPERTY; SURFACE TENSION; THERMAL CONDUCTIVITY; ULTRASTRUCTURE; YOUNG MODULUS;

CRYSTALLIZATION; ELASTIC MODULUS; HOT TEMPERATURE; MACROMOLECULAR SUBSTANCES; MATERIALS TESTING; MOLECULAR CONFORMATION; MOLECULAR IMPRINTING; NANOSTRUCTURES; PARTICLE SIZE; POLYMERS; SURFACE PROPERTIES; SURFACE TENSION; THERMAL CONDUCTIVITY;

EID: 84861314594     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/23/235303     Document Type: Article

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