Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning

Applied Surface Science

Volumn 258, Issue 18, 2012, Pages 7135-7139

  Homola, Tomáš ^a,b   Matoušek, Jindřich ^c   Medvecká, Veronika ^a   Zahoranová, Anna ^a   Kormunda, Martin ^c   Kováčik, Dušan ^a,d   Černák, Mirko ^a,d  

^a Faculty of Natural Sciences   (Slovakia)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^c J E PURKINJE UNIVERSITY   (Czech Republic)

^d MASARYK UNIVERSITY   (Czech Republic)

Author keywords

Atmospheric diffuse plasma; Cleaning; DCSBD; Filament free plasma; ITO surface; XPS

Indexed keywords

AIR CLEANERS; ATMOSPHERIC CHEMISTRY; ATMOSPHERIC PRESSURE; BINDING ENERGY; CLEANING; CONTACT ANGLE; INDIUM COMPOUNDS; OXYGEN; PLASMA APPLICATIONS; SURFACE CLEANING; TIN OXIDES; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL CHANGE; DCSBD; DIFFUSE COPLANAR SURFACE BARRIER DISCHARGES (DCSBD); DIFFUSE PLASMA; ENERGY COMPONENTS; INDIUM TIN OXIDE; PLASMA TREATMENT; WATER CONTACT ANGLE;

ELECTRIC DISCHARGES;

EID: 84861098185     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.03.188     Document Type: Article

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