Roles of oxidizing species in a nonequilibrium atmospheric-pressure pulsed remote O2/N2 plasma glass cleaning process

Journal of Applied Physics

Volumn 103, Issue 2, 2008, Pages

  Iwasaki, Masahiro ^a   Matsudaira, Yuto ^a   Takeda, Keigo ^b   Ito, Masafumi ^b   Miyamoto, Eiji ^c   Yara, Takuya ^c   Uehara, Tsuyoshi ^c   Hori, Masaru ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b WAKAYAMA UNIVERSITY   (Japan)

^c SEKISUI CHEMICAL CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ATMOSPHERIC PRESSURE; GLASS; NITROGEN; OXYGEN; PLASMAS;

GLASS CLEANING PROCESS; OXIDIZING SPECIES;

CLEANING;

EID: 38849084568     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2830982     Document Type: Article

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