A teaching factory for polymer microfabrication - μFac

International Journal of Nanomanufacturing

Volumn 6, Issue 1-4, 2010, Pages 137-151

  Hardt, David E ^a   Anthony, Brian W ^a   Tor, Shu Beng ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Micro manufacturing; Microembossing; Microfluidic device production inspection; Polymer microfabrication

Indexed keywords

FLUIDIC DEVICES; MICROANALYSIS; MICROFABRICATION; MICROFLUIDICS; POLYMERS;

FUNCTIONAL PRODUCTS; MATERIAL PROCESSING; METROLOGY METHODS; MICRO-FLUIDIC DEVICES; MICRO-MANUFACTURING; MICROEMBOSSING; POLYMER MICROFABRICATION; VOLUME PRODUCTION;

PROCESS CONTROL;

EID: 77956023275     PISSN: 17469392     EISSN: 17469406     Source Type: Journal    
DOI: 10.1504/IJNM.2010.034779     Document Type: Article

References (14)

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