Large field of view, high spatial resolution, surface measurements

International Journal of Machine Tools and Manufacture

Volumn 38, Issue 5-6, 1998, Pages 691-698

  Wyant, James C ^a,b   Schmit, Joanna ^a,b  

^a WYKO Corporation   (United States)

^b UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; SURFACE STRUCTURE;

FIELD OF VIEW (FOV);

SURFACE MEASUREMENT;

EID: 0032064127     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0890-6955(97)00119-3     Document Type: Article

References (11)

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6. M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, "An Application of Interference Microscopy to Integrated Circuit Inspection and Metrology," Proc. SPIE, 775, 233-247 (1987).
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11. J. Schwider, "Advanced evaluation techniques in interferometry," in Progress in Optics XXVIII, E. Wolf, ed. (Elsevier, New York, 1990), 271-359.