Three dimensional sidewall measurements by laser fluorescent confocal microscopy

Optics Express

Volumn 16, Issue 6, 2008, Pages 4001-4014

  Li, Shiguang ^a,b,c   Xu, Zhiguang ^a,b,c   Reading, Ivan ^c   Yoon, Soon Fatt ^b   Fang, Zhong Ping ^c   Zhao, Jianhong ^c  

^a SINGAPORE MIT ALLIANCE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; FEATURE EXTRACTION; LASER OPTICS; MICROOPTICS; MICROSTRUCTURE; THREE DIMENSIONAL;

CONCAVE FEATURES; CONCAVE MICRO STRUCTURES; LASER FLUORESCENT CONFOCAL MICROSCOPY; SIDEWALL MEASUREMENTS;

CONFOCAL MICROSCOPY;

ALGORITHM; ARTICLE; COMPUTER ASSISTED DIAGNOSIS; CONFOCAL MICROSCOPY; FLUORESCENCE MICROSCOPY; LASER; METHODOLOGY; THREE DIMENSIONAL IMAGING;

ALGORITHMS; IMAGE INTERPRETATION, COMPUTER-ASSISTED; IMAGING, THREE-DIMENSIONAL; LASERS; MICROSCOPY, CONFOCAL; MICROSCOPY, FLUORESCENCE;

EID: 41149096708     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.004001     Document Type: Article

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