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Volumn 103, Issue , 2012, Pages 98-107

Fabrication of antireflective layers on silicon using metal-assisted chemical etching with in situ deposition of silver nanoparticle catalysts

Author keywords

Antireflection; Metal assisted chemical etching; Porous silicon

Indexed keywords

AG FILMS; AG PARTICLES; ANTI-REFLECTION; ANTI-REFLECTIVE LAYERS; CHEMICAL ETCHING; IN-SITU DEPOSITION; METAL-ASSISTED CHEMICAL ETCHING; MICRO-SCALES; NANO SCALE; NANO-SCALE ROUGHNESS; OPTIMAL CONDITIONS; PROCESSING CONDITION; REDUCTANTS; SILVER NANOPARTICLES; SURFACE REFLECTIVITY;

EID: 84860586260     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2012.04.020     Document Type: Article
Times cited : (56)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.