Development and calibration of mirrors and gratings for the Soft X-ray Materials Science beamline at the Linac Coherent Light Source free-electron laser

Applied Optics

Volumn 51, Issue 12, 2012, Pages 2118-2128

  Soufli, Regina ^a   Fernández Perea, Mónica ^a,b   Baker, Sherry L ^a   Robinson, Jeff C ^a   Gullikson, Eric M ^c   Heimann, Philip ^c,d   Yashchuk, Valeriy V ^c   McKinney, Wayne R ^c   Schlotter, William F ^d   Rowen, Michael ^d  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b CSIC   (Spain)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^d SLAC NATIONAL ACCELERATOR LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BORON CARBIDE; CALIBRATION; COATINGS; COHERENT LIGHT; DIFFRACTION; ELECTRONS; FREE ELECTRON LASERS; LASER MIRRORS; LIGHT SOURCES; LINEAR ACCELERATORS; MIRRORS; SURFACE TOPOGRAPHY; THICKNESS MEASUREMENT;

ADVANCED LIGHT SOURCE; COATING THICKNESS; DIFFRACTIVE ELEMENT; LINAC COHERENT LIGHT SOURCE; LONG TRACE PROFILER; OPTICAL PROFILOMETRY; ROOT MEAN SQUARE; SOFT X-RAY REGIONS;

DIFFRACTION GRATINGS;

SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CALIBRATION; CHEMISTRY; ELECTRON; EQUIPMENT DESIGN; LASER; LIGHT; METHODOLOGY; OPTICS; PHOTON; X RAY;

CALIBRATION; ELECTRONS; EQUIPMENT DESIGN; LASERS; LIGHT; MICROSCOPY, ATOMIC FORCE; OPTICS AND PHOTONICS; PHOTONS; SILICON; X-RAYS;

EID: 84860169881     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.51.002118     Document Type: Article

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