High-range angular rate sensor based on mechanical frequency modulation

Journal of Microelectromechanical Systems

Volumn 21, Issue 2, 2012, Pages 398-405

  Zotov, Sergei A ^a   Trusov, Alexander A ^a   Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Frequency modulation (FM); gyroscope; rate sensor

Indexed keywords

AMPLITUDE-MODULATED; ANGULAR RATE; ANGULAR RATE SENSORS; CORIOLIS VIBRATORY GYROSCOPES; DIFFERENTIAL FREQUENCY; DIGITAL PHASE LOCKED LOOPS; DYNAMIC EFFECTS; DYNAMIC RANGE; HIGH-SPEED; LINEAR RANGE; MECHANICAL FREQUENCY; Q-FACTORS; RATE SENSORS; REAL-TIME IMPLEMENTATIONS; ROTATION RATE; SELF-CALIBRATING; SILICON MEMS; STRUCTURAL CHARACTERIZATION; TEMPERATURE CHARACTERIZATION; TEMPERATURE RANGE;

ELECTROMECHANICAL DEVICES; FREQUENCY MODULATION; GYROSCOPES; MEMS; NATURAL FREQUENCIES; PHASE LOCKED LOOPS; REAL TIME CONTROL; SIGNAL PROCESSING; VIBRATIONS (MECHANICAL);

SENSORS;

EID: 84859733892     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2178116     Document Type: Article

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