Sub-degree-per-hour silicon MEMS rate sensor with 1 million Q-factor

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2809-2812

  Prikhodko, I P ^a   Zotov, S A ^a   Trusov, A A ^a   Shke, A M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

gyrocompassing; MEMS gyroscope; north finding

Indexed keywords

BIAS STABILITY; GYROCOMPASSING; MEMS GYROSCOPE; MODE MISMATCH; NOISE DENSITY; NORTH-FINDING; Q-FACTORS; QUALITY FACTORS; RATE SENSORS; SILICON MEMS;

ACTUATORS; ENERGY DISSIPATION; GYROSCOPES; MICROSYSTEMS; Q FACTOR MEASUREMENT;

SOLID-STATE SENSORS;

EID: 80052112093     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969216     Document Type: Conference Paper

References (8)

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