Foucault pendulum on a chip: Angle measuring silicon MEMS gyroscope

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 161-164

  Prikhodko, Igor P ^a   Zotov, Sergei A ^a   Trusov, Alexander A ^a   Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASURING; EXPERIMENTAL CHARACTERIZATION; FOUCAULT PENDULUM; LINEAR RESPONSE; OPERATIONAL FREQUENCY; Q-FACTORS; QUALITY FACTORS; RANGE CONSTRAINTS; RESONANT FREQUENCIES; SILICON MEMS GYROSCOPES;

ANGLE MEASUREMENT; BANDWIDTH; DAMPING; GYROSCOPES; MECHANICAL ENGINEERING; NATURAL FREQUENCIES; REACTIVE ION ETCHING; VACUUM;

MEMS;

EID: 79953767825     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734386     Document Type: Conference Paper

References (9)

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