Electrostatic regulation of quality factor in non-ideal tuning fork MEMS

Proceedings of IEEE Sensors

Volumn , Issue , 2011, Pages 20-23

  Trusov, Alexander A ^a   Zotov, Sergei A ^a   Shkel, Andrei M ^a  

^a University of California at Irvine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL MODEL; ANCHOR LOSS; FABRICATION IMPERFECTIONS; LOSS OF ENERGY; OPERATIONAL FREQUENCY; Q-FACTORS; QUALITY FACTORS; SOI-MEMS; SPRING EFFECTS; SYMMETRIC STRUCTURES; THERMOELASTICS; TUNING FORKS;

ELECTROSTATICS; GYROSCOPES; RESONATORS; SENSORS; STIFFNESS;

Q FACTOR MEASUREMENT;

EID: 84856927328     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2011.6127251     Document Type: Conference Paper

References (7)

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