Integrated optical pressure sensors in silicon-on-insulator

IEEE Photonics Journal

Volumn 4, Issue 2, 2012, Pages 443-450

  Hallynck, E ^a   Bienstman, P ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

Nanophotonics; optoelectronic and photonic sensor; photonic integrated circuits

Indexed keywords

EXPLOSIVE ENVIRONMENTS; OPTICAL PRESSURE SENSORS; PHOTONIC INTEGRATED CIRCUITS; PHOTONIC SENSORS; RING RESONATOR; SILICON ON INSULATOR; SILICON SUBSTRATES; SPECTRAL FEATURE; THIN MEMBRANE;

NANOPHOTONICS;

PRESSURE SENSORS;

EID: 84859728071     PISSN: 19430655     EISSN: None     Source Type: Journal    
DOI: 10.1109/JPHOT.2012.2189614     Document Type: Article

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