Optical MEMS pressure sensor using ring resonator on a circular diaphragm

Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Volumn , Issue , 2005, Pages 277-280

  Pattnaik, Prasant Kumar ^a   Vijayaaditya, Bh ^a   Srinivas, T ^a   Selvarajan, A ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; MICROSENSORS; OPTICAL RESONATORS; PRESSURE EFFECTS; REFRACTIVE INDEX; RESONANCE; WAVEGUIDES;

PHASE RESPONSE; RING RESONATORS; SILICON DIAPHRAGM;

MICROELECTROMECHANICAL DEVICES;

EID: 33749078169     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2005.94     Document Type: Conference Paper

References (6)

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