Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm

Optics Express

Volumn 18, Issue 9, 2010, Pages 9006-9014

  Wang, Wenhui ^a   Wu, Nan ^a   Tian, Ye ^a   Niezrecki, Christopher ^a   Wang, Xingwei ^a  

^a University of Massachusetts   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; ETCHING; FABRY-PEROT INTERFEROMETERS; FIBER OPTICS; FIBERS; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL MATERIALS; PRESSURE SENSORS; PRESSURE TRANSDUCERS; SILICA; SILICON WAFERS; THIN FILMS;

A-THERMAL; FABRY-PEROT; FABRY-PEROT CAVITY; NON-INTRUSIVE; SENSING APPLICATIONS; SILICA OPTICAL FIBERS; SILICON SUBSTRATES; THIN DIAPHRAGMS; THIN SILICA DIAPHRAGM; ULTRA-THIN;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77952083147     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.009006     Document Type: Article

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