Integrated optical and electronic pressure sensor

IEEE Sensors Journal

Volumn 11, Issue 2, 2011, Pages 343-350

  Padron, Ivan ^a   Fiory, Anthony T ^a   Ravindra, Nuggehalli M ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Diaphragm pressure sensor; embossed diaphragm; Fabry Perot interferometry; integrated sensor; piezoresistors

Indexed keywords

DIAPHRAGM PRESSURE; EMBOSSED DIAPHRAGM; FABRY-PEROT INTERFEROMETRY; INTEGRATED SENSORS; PIEZO-RESISTORS;

BRIDGE CIRCUITS; ELECTRIC CONDUCTIVITY; FABRY-PEROT INTERFEROMETERS; INTERFEROMETRY; PRESSURE SENSORS; STRESSES;

DIAPHRAGMS;

EID: 78649282302     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2010.2062175     Document Type: Article

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