High-sensitivity Fabry-Perot interferometric pressure sensor based on a nanothick silver diaphragm

Optics Letters

Volumn 37, Issue 2, 2012, Pages 133-135

  Xu, Feng ^a   Ren, Dongxu ^a   Shi, Xiaolong ^a   Li, Can ^a   Lu, Weiwei ^a   Lu, Lu ^a   Lu, Liang ^a   Yu, Benli ^a  

^a ANHUI UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EXTRINSIC FABRY PEROT INTERFEROMETER; FABRICATION PROCESS; FABRY-PEROT; HIGH PRESSURE; HIGH QUALITY; HIGH-SENSITIVITY; HIGHLY SENSITIVE; INTERFEROMETRIC PRESSURE SENSORS; LINEAR RESPONSE; LOW COSTS; POTENTIAL APPLICATIONS; PRESSURE VARIATIONS;

DIAPHRAGMS; ELECTROLESS PLATING; FABRY-PEROT INTERFEROMETERS; SENSITIVITY ANALYSIS;

PRESSURE SENSORS;

EID: 84863011690     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.37.000133     Document Type: Article

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