Imbalanced Mach-Zehnder Interferometer Integrated in Micromachined Silicon Substrate for Pressure Sensor

Journal of Lightwave Technology

Volumn 17, Issue 2, 1999, Pages 229-233

  Porte, Henri ^a   Gorel, Véronique ^a   Kiryenko, Stefan ^a   Goedgebuer, Jean Pierre ^a   Daniau, William ^b   Blind, Pascal ^c  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b FEMTO ST INSTITUTE   (France)

^c Ctr Techniques Industrie H   (France)

Author keywords

Coherence modulation; Integrated optics; Mach Zehnder interferometer; Pressure sensor; Silicon micromachining

Indexed keywords

INTEGRATED OPTICS; INTERFEROMETERS; MEMBRANES; MICROMACHINING; OPTICAL WAVEGUIDES; PRESSURE TRANSDUCERS; SILICON NITRIDE; SILICON SENSORS; SPECTRUM ANALYSIS;

COHERENCE MODULATION; INTERFEROMETRIC PRESSURE SENSORS; MACH-ZEHNDER INTERFEROMETERS;

OPTICAL SENSORS;

EID: 0033078355     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/50.744229     Document Type: Article

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