Wide range pressure sensor based on a piezoelectric bimorph microcantilever

Applied Physics Letters

Volumn 88, Issue 13, 2006, Pages

  Mortet, V ^a,b   Petersen, R ^b   Haenen, K ^c   D'Olieslaeger, M ^c  

^a HASSELT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

^c IMEC vzw ^*

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; DRAG; FREQUENCY SHIFT KEYING; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES;

FREQUENCY SHIFT; PIEZOELECTRIC BIMORPH MICROCANTILEVER; PRESSURE SENSORS; TEMPERATURE SENSORS;

SENSORS;

EID: 33645499837     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2190462     Document Type: Article

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