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Volumn 258, Issue 16, 2012, Pages 6007-6012

Lithographically patterned silicon nanostructures on silicon substrates

(7) Megouda, Nacéra a,b,c,d Piret, Gaëlle a,b Galopin, Elisabeth a,b Coffinier, Yannick a,b Hadjersi, Toufik d Elkechai, Omar c Boukherroub, Rabah a,b

a UNIV LILLE (France)

b INSTITUT D ELECTRONIQUE (France)

c UNIVERSITÉ MOULOUD MAMMERI (Algeria)

d L'Unite de Developpement de la Technologie du Silicium (Algeria)

Author keywords

Electroless etching; Optical lithography; Patterning; Silicon nanostructures; Silicon nanowires

Indexed keywords

CRYSTALLINE MATERIALS; DOPING (ADDITIVES); ETCHING; GOLD DEPOSITS; HYDROFLUORIC ACID; NANOWIRES; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SOLUTIONS; THERMAL EVAPORATION;

CHEMICAL DISSOLUTION; CRYSTALLINE SILICONS; ELECTROLESS ETCHINGS; HYDROGEN-TERMINATED SILICON; PATTERNING; SILICON NANO STRUCTURES; SILICON NANOWIRE ARRAYS; SILICON NANOWIRES;

SUBSTRATES;

EID: 84859614343 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2012.02.085 Document Type: Article

Times cited : (10)

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