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Volumn 258, Issue 15, 2012, Pages 5659-5665
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Role of ion energy on growth and optical dispersion of nanocrystalline TiO 2 films prepared by magnetron sputtering with ion assistance at the substrate
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Author keywords
Ion energy; Optical dispersion; Reactive sputtering; Substrate bias
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Indexed keywords
AMORPHOUS FILMS;
CRYSTALLITE SIZE;
DISPERSIONS;
FILM GROWTH;
INFRARED DEVICES;
ION BOMBARDMENT;
MAGNETRON SPUTTERING;
NANOCRYSTALS;
OPTICAL COATINGS;
OXIDE MINERALS;
REACTIVE SPUTTERING;
TITANIUM DIOXIDE;
X RAY DIFFRACTION;
ION ENERGIES;
NANOCRYSTALLINE TIO2 FILMS;
OPTICAL DISPERSION;
OPTICAL DISPERSION PARAMETERS;
REACTIVE MAGNETRON SPUTTERING;
SINGLE-OSCILLATOR MODEL;
SUBSTRATE BIAS;
VISIBLE AND NEAR INFRARED;
OPTICAL FILMS;
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EID: 84859155284
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2012.02.051 Document Type: Article |
Times cited : (14)
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References (37)
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