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Volumn 258, Issue 15, 2012, Pages 5659-5665

Role of ion energy on growth and optical dispersion of nanocrystalline TiO 2 films prepared by magnetron sputtering with ion assistance at the substrate

Author keywords

Ion energy; Optical dispersion; Reactive sputtering; Substrate bias

Indexed keywords

AMORPHOUS FILMS; CRYSTALLITE SIZE; DISPERSIONS; FILM GROWTH; INFRARED DEVICES; ION BOMBARDMENT; MAGNETRON SPUTTERING; NANOCRYSTALS; OPTICAL COATINGS; OXIDE MINERALS; REACTIVE SPUTTERING; TITANIUM DIOXIDE; X RAY DIFFRACTION;

EID: 84859155284     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.02.051     Document Type: Article
Times cited : (14)

References (37)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.