Microstructure and elastic properties of atomic layer deposited TiO 2 anatase thin films

Acta Materialia

Volumn 59, Issue 7, 2011, Pages 2891-2900

  Borgese, L ^a   Bontempi, E ^a   Gelfi, M ^a   Depero, L E ^a   Goudeau, P ^b   Geandier, G ^c   Thiaudire, D ^d  

^a UNIVERSITY OF BRESCIA   (Italy)

^b UPR 3346   (France)

^c UNIVERSITÉ PAUL VERLAINE METZ   (France)

^d SYNCHROTRON SOLEIL   (France)

Author keywords

Anatase; Elastic anisotropy; Residual stresses; Synchrotron radiation; X ray diffraction

Indexed keywords

AMORPHOUS TIO; ANATASE; ANATASE PHASE; ANATASE-TO-RUTILE TRANSFORMATIONS; ATOMIC LAYER DEPOSITED; COORDINATION CHANGE; ELASTIC ANISOTROPY; ELASTIC PROPERTIES; EX SITU; KAPTON SUBSTRATE; MICROSTRUCTURE OF FILMS; STRESS CALCULATIONS; TIO; X-RAY NEAR-EDGE STRUCTURES; XANES;

ANISOTROPY; ATOMIC LAYER DEPOSITION; DEPOSITION; DIFFRACTION; MICROSTRUCTURE; OXIDE MINERALS; POLYIMIDES; RESIDUAL STRESSES; SUBSTRATES; SYNCHROTRON RADIATION; SYNCHROTRONS; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION; X RAYS;

TITANIUM DIOXIDE;

EID: 79952361288     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2011.01.032     Document Type: Article

References (44)

1. H. Kim, H.B.R. Lee, and W.J. Maeng Thin Solid Films 517 2010 2563 2580
2. Becker JS, PhD Thesis. Cambridge: Harvard University; 2002.
3. I. Alessandri, M. Zucca, M. Ferroni, E. Bontempi, and L.E. Depero Cryst Growth Des 9 2009 1258 1259
4. B. Ilic, S. Krylov, and H.G. Craighead J Appl Phys 108 2010 044317 044328
5. A. Fujishima, X. Zhang, and D.A. Tryk Surf Sci Rep 63 2008 515 582
6. M. Putkonen, T. Sajavaara, P. Rahldla, L. Xu, S. Cheng, L. Niinisto, and H. Whitlow Thin Solid Films 517 2009 5819 5824
7. Y. Tong, Y. Li, F. Xie, and M. Ding Polym Int 49 2000 1543 1547
8. T. Arlt, M. Bermejo, M.A. Blanco, L. Gerward, J.Z. Jiang, J. Staun Olsen, and J.M. Recio Phys Rev B 61 2000 14414 14419
9. N. Arimitsu, A. Nakajima, K. Saito, Y. Kameshima, and K. Okada Chem Lett 36 2007 106 107
10. A. Lotnyk, S. Senz, and D. Hesse Thin Solid Films 515 2007 3439 3447
11. I. Jouanny, S. Labdi, P. Aubert, C. Buscema, O. Maciejak, and M.H. Berger Thin Solid Film 518 2010 3212 3217
12. P. Huang, F. Wang, K. Xu, and Y. Han Surf Coating Technol 201 2007 5168 5171
13. Y. Gaillard, E. Jimenez-Pique, and A.R. Gonzalez-Elipe J Phys D 42 2009 145305 145314
14. M. Iuga, G. Steinle-Neumann, and J. Meinhardt Eur Phys J B 58 2007 127 133
15. X.G. Ma, P. Liang, L. Miao, S.W. Bie, C.K. Zhang, L. Xu, and J.J. Jiang Phys Status Solidi B 246 2009 2132 2139
16. E. Shojaee, and M.R. Mohammadizadeh J Phys Condens Matter 22 2010 015401 015408
17. I.C. Noyan, and J.B. Cohen Residual stress: measurement by diffraction and interpretation 1987 Springer Heidelberg
18. U. Welzel, J. Ligot, P. Lamparter, A.C. Vermeulenb, and E.J. Mittemeijera J Appl Cryst 38 2005 1 29
19. E. Bontempi, P. Zanola, M. Gelfi, M. Zucca, L.E. Depero, and B. Girault Nucl Instrum Methods Phys Res, Sect B 268 2010 365 369
20. http://www.synchrotron-soleil.fr/portal/page/portal/Recherche/ LignesLumiere/DIFFABS.
21. F. Baudelet, R. Belkhou, V. Briois, A. Coati, P. Dumas, and V.H. Etgens Oil Gas Sci Technol - Rev IFP 60 2005 849 874
22. Powder Diffraction File - International Center for Diffraction Data (PDF-ICDD) No. 00-021-1272.
23. M. Ree, K.J. Chen, and D.P. Kirby J Appl Phys 72 1992 2014 2021
24. G.K. Williamson, and W.H. Hall Acta Metall 1 1954 22 31
25. A.N. Kravtsova, A.V. Soldatov, M. Nachtegaal, M.W. Tew, and J.A. Van Bokhoven Phys B 405 2010 724 726
26. Z. Zhang, G. Triani, and L.J. Fan J Mater Res 23 2008 2472 2479
27. F. Badawi, and P. Villain J Appl Cryst 36 2003 869 879
28. V. Hauk Structural and residual stress analysis by non-destructive methods: evaluation, application, assessment 1997 Elsevier Amsterdam
29. R. Hill Proc Phys Soc Lond A65 1952 349 354
30. D. Faurie, O. Castelnau, R. Brenner, P.O. Renault, E. Le Bourhis, and P. Goudeau J Appl Crystallogr 42 2009 1073 1084
31. C.W. Mays, J.S. Vermaak, and D. Kuhlmann Wilsdorf Surf Sci 12 1968 134 140
32. I. Alessandri, M. Zucca, M. Ferroni, E. Bontempi, and L.E. Depero Small 5 2009 336 340
33. R.D. Shannon, and J.A. Pask J Am Ceram Soc 48 1965 391 398
34. L.E. Depero, L. Sangaletti, B. Allieri, E. Bontempi, R. Salari, and M. Zocchi J Mater Res 12 1998 1644 1649
35. C. Garzella, E. Bontempi, L.E. Depero, A. Vomiero, G. Della Mea, and G. Sberveglieri Sens Actuat B 93 2003 495 502
36. L.E. Depero, A. Marino, B. Allieri, E. Bontempi, L. Sangaletti, C. Casale, and M. Notaro J Mater Res 15 2000 2080 2086
37. A. Amy, G. Banfield, and J.F. Banfield Am Miner 82 1997 717 728
38. L.E. Depero, L. Sangaletti, B. Allieri, E. Bontempi, A. Marino, and M. Zocchi J Cryst Growth 198-199 1999 516 520
39. T. Sakai, Y. Kuniyoshi, W. Aoki, S. Ezoe, T. Endo, and Y. Hoshi Thin Solid Films 516 2008 5860 5863
40. http://www2.dupont.com/Kapton/en-US/index.html.
41. D.H. Chung, and W.R. Buessem J Appl Phys 38 1967 2010 2012
42. H. Ozkan J Eur Ceram Soc 28 2008 3091 3095
43. J.F. Nye Physical properties of crystals 1957 Oxford Univ Press London
44. Y. He, R.B. Schwarz, A. Migliori, and S.H. Whang J Mater Res 10 1995 1187 1194